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Meng-Fu Shih
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Model optimization approach based on spectral sensitivity
Patent number
10,255,385
Issue date
Apr 9, 2019
KLA-Tencor Corporation
Stilian Ivanov Pandev
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Method of determining an asymmetric property of a structure
Patent number
9,239,522
Issue date
Jan 19, 2016
KLA-Tencor Corporation
Meng-Fu Shih
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
MODEL OPTIMIZATION APPROACH BASED ON SPECTRAL SENSITIVITY
Publication number
20130262044
Publication date
Oct 3, 2013
Stilian Ivanov Pandev
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF DETERMINING AN ASYMMETRIC PROPERTY OF A STRUCTURE
Publication number
20120086940
Publication date
Apr 12, 2012
Meng-Fu Shih
G01 - MEASURING TESTING