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Patents Grantslast 30 patents

Information Patent Grant
Method for positioning a transfer unit, method for calculating posi...
- Patent number 9,541,920
- Issue date Jan 10, 2017
- Tokyo Electron Limited
- Masato Kubodera
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR POSITIONING A TRANSFER UNIT, METHOD FOR CALCULATING POSI...
- Publication number 20140107825
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Masato KUBODERA
- H01 - BASIC ELECTRIC ELEMENTS