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Miaden Bumbulovic
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Vancouver, CA
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last 30 patents
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Patent Grant
Enhanced rapid thermal processing apparatus and method
Patent number
7,398,014
Issue date
Jul 8, 2008
Mattson Technology
Dave Camm
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Enhanced rapid thermal processing apparatus and method
Patent number
7,184,657
Issue date
Feb 27, 2007
Mattson Technology, Inc.
Dave Camm
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ENHANCED RAPID THERMAL PROCESSING APPARATUS AND METHOD
Publication number
20080152330
Publication date
Jun 26, 2008
Dave Camm
H01 - BASIC ELECTRIC ELEMENTS