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Taoyuan, TW
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last 30 patents
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Patent Grant
Lid for micro-electro-mechanical device and method for fabricating...
Patent number
8,610,006
Issue date
Dec 17, 2013
Unimicron Technology Corporation
Shih-Ping Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
LID FOR MICRO-ELECTRO-MECHANICAL DEVICE AND METHOD FOR FABRICATING...
Publication number
20100108345
Publication date
May 6, 2010
Unimicron Technology Corporation
Shih-Ping Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY