Michael A. Purvis

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System for monitoring a plasma
- Patent number 12,171,053
- Issue date Dec 17, 2024
- ASML Netherlands B.V.
- Michael Anthony Purvis
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for monitoring a plasma
- Patent number 11,266,002
- Issue date Mar 1, 2022
- ASML Netherlands B.V.
- Michael Anthony Purvis
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of improving measurement of energy of extreme ultraviolet ra...
- Patent number 10,210,963
- Issue date Feb 19, 2019
- ASML Netherlands B.V.
- Vahan A. Senekerimyan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Minimizing grazing incidence reflections for reliable EUV power mea...
- Patent number 9,546,901
- Issue date Jan 17, 2017
- ASML Netherlands B.V.
- Vahan A. Senekerimyan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable radius mirror dichroic beam splitter module for extreme ul...
- Patent number 9,516,729
- Issue date Dec 6, 2016
- ASML Netherlands B.V.
- Kevin W Zhang
- G02 - OPTICS
Information Patent Grant
Extreme ultraviolet light source
- Patent number 9,357,625
- Issue date May 31, 2016
- ASML Netherlands B.V.
- Yezheng Tao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR MONITORING A PLASMA
- Publication number 20220151052
- Publication date May 12, 2022
- ASML NETHERLANDS B.V.
- Michael Anthony Purvis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR MONITORING A PLASMA
- Publication number 20200344868
- Publication date Oct 29, 2020
- ASML NETHERLANDS B.V.
- Michael Anthony Purvis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEA...
- Publication number 20170084360
- Publication date Mar 23, 2017
- ASML NETHERLANDS B.V.
- Vahan A. Senekerimyan
- G01 - MEASURING TESTING
Information Patent Application
Variable Radius Mirror Dichroic Beam Splitter Module for Extreme Ul...
- Publication number 20160174351
- Publication date Jun 16, 2016
- ASML NETHERLANDS B.V.
- Kevin W. Zhang
- G02 - OPTICS
Information Patent Application
MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEA...
- Publication number 20160054174
- Publication date Feb 25, 2016
- ASML Netherlands B.V.
- Vahan A. Senekerimyan
- G01 - MEASURING TESTING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20160007434
- Publication date Jan 7, 2016
- ASML NETHERLANDS B.V.
- Yezheng Tao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR