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Michael Andrew Chieda
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Stratford, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Reticle sub-field thermal control
Patent number
11,500,298
Issue date
Nov 15, 2022
ASML Holding N.V.
Eric Justin Monkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chucks and clamps for holding objects of a lithographic apparatus a...
Patent number
RE49066
Issue date
May 10, 2022
ASML Holding N.V.
Raymond Wilhelmus Louis Lafarre
Information
Patent Grant
Apparatus for and method cleaning a support inside a lithography ap...
Patent number
11,048,175
Issue date
Jun 29, 2021
ASML Holding N.V.
Victor Antonio Perez-Falcon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chucks and clamps for holding objects of a lithographic apparatus a...
Patent number
10,324,383
Issue date
Jun 18, 2019
ASML Holding N.V.
Raymond Wilhelmus Louis Lafarre
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
RETICLE SUB-FIELD THERMAL CONTROL
Publication number
20220057723
Publication date
Feb 24, 2022
ASML Holding N.V.
Eric Justin MONKMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus for and Method Cleaning a Support Inside a Lithography Ap...
Publication number
20200348606
Publication date
Nov 5, 2020
ASML Holding N.V.
Victor Antonio PEREZ-FALCON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS A...
Publication number
20180321602
Publication date
Nov 8, 2018
ASML Holding N.V.
Raymond Wilhelmus Louis LAFARRE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Quantitative Reticle Distortion Measurement System
Publication number
20150212425
Publication date
Jul 30, 2015
ASML Holding N.V.
Michael Andrew Chieda
G01 - MEASURING TESTING