Michael Arnz

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining the registration of a structure on a photoma...
- Patent number 10,113,864
- Issue date Oct 30, 2018
- Carl Zeiss SMT GmbH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus with wavefront measuring device and o...
- Patent number 10,012,911
- Issue date Jul 3, 2018
- Carl Zeiss SMT GmbH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Test object for measuring the point spread function of an optical s...
- Patent number 9,797,805
- Issue date Oct 24, 2017
- Carl Zeiss SMT GmbH
- Lars Stoppe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for determining a lateral offset of a pattern on...
- Patent number 9,786,046
- Issue date Oct 10, 2017
- Carl Zeiss SMT GmbH
- Michael Arnz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measuring device for measuring an illumination property
- Patent number 9,377,415
- Issue date Jun 28, 2016
- Carl Zeiss SMT GmbH
- Michael Arnz
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining the registration of a structure on a photoma...
- Patent number 9,303,975
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Michael Arnz
- G01 - MEASURING TESTING
Information Patent Grant
Grating-assisted autofocus device and autofocusing method for an im...
- Patent number 9,297,994
- Issue date Mar 29, 2016
- Carl Zeiss SMS GmbH
- Sascha Perlitz
- G02 - OPTICS
Information Patent Grant
Autofocus device and autofocusing method for an imaging device
- Patent number 9,229,209
- Issue date Jan 5, 2016
- Carl Zeiss SMT GmbH
- Michael Arnz
- G02 - OPTICS
Information Patent Grant
Method and device for determining the position of a first structure...
- Patent number 9,014,505
- Issue date Apr 21, 2015
- Carl Zeiss SMT GmbH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for measuring the relative local position error o...
- Patent number 8,731,273
- Issue date May 20, 2014
- Carl Zeiss SMS GmbH
- Michael Arnz
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for the position determination of structures o...
- Patent number 8,694,929
- Issue date Apr 8, 2014
- Carl Zeiss SMT GmbH
- Dirk Seidel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determination of the relative position of two structures
- Patent number 8,693,805
- Issue date Apr 8, 2014
- Carl Zeiss SMS GmbH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for calibrating a specimen stage of a metrology system and m...
- Patent number 8,473,237
- Issue date Jun 25, 2013
- Carl Zeiss SMS GmbH
- Alexander Huebel
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for determining the position of an edge of a mark...
- Patent number 8,457,411
- Issue date Jun 4, 2013
- Carl Zeiss SMS GmbH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining the position of a structure on...
- Patent number 8,369,605
- Issue date Feb 5, 2013
- Carl Zeiss SMS GmbH
- Michael Arnz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for determining the relative overlay shift of...
- Patent number 8,260,033
- Issue date Sep 4, 2012
- Carl Zeiss SMS GmbH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring scattered light on an optical sy...
- Patent number 8,218,148
- Issue date Jul 10, 2012
- Carl Zeiss SMT GmbH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for range-resolved determination of scattered lig...
- Patent number 7,755,748
- Issue date Jul 13, 2010
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for the range-resolved determination of scattered light, ope...
- Patent number 7,408,631
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moiré method and a system for measuring the distortion of a...
- Patent number 6,816,247
- Issue date Nov 9, 2004
- Carl Zeiss SMT AG
- Joachim Heppner
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS WITH WAVEFRONT MEASURING DEVICE AND O...
- Publication number 20170336714
- Publication date Nov 23, 2017
- Carl Zeiss SMT GMBH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method For Determining The Registration Of A Structure On A Photoma...
- Publication number 20160195387
- Publication date Jul 7, 2016
- Carl Zeiss SMT GMBH
- Michael Arnz
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR DETERMINING A LATERAL OFFSET OF A PATTERN ON...
- Publication number 20160104275
- Publication date Apr 14, 2016
- Carl Zeiss SMT GMBH
- Michael Arnz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TEST OBJECT FOR MEASURING THE POINT SPREAD FUNCTION OF AN OPTICAL S...
- Publication number 20150355052
- Publication date Dec 10, 2015
- Carl Zeiss SMT GMBH
- Lars Stoppe
- G01 - MEASURING TESTING
Information Patent Application
Measuring Device for Measuring an Illumination Property
- Publication number 20150015875
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Michael Arnz
- G01 - MEASURING TESTING
Information Patent Application
Autofocus Device and Autofocussing Method For An Imaging Device
- Publication number 20130062501
- Publication date Mar 14, 2013
- CARL ZEISS SMT GMBH
- Sascha Perlitz
- G02 - OPTICS
Information Patent Application
Method And Apparatus For The Position Determination Of Structures O...
- Publication number 20130019212
- Publication date Jan 17, 2013
- Dirk Seidel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR DETERMINING THE POSITION OF A FIRST STRUCTURE...
- Publication number 20120314910
- Publication date Dec 13, 2012
- CARL ZEISS SMT GMBH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION OF THE RELATIVE POSITION OF TWO STRUCTURES
- Publication number 20120121205
- Publication date May 17, 2012
- CARL ZEISS SMS GMBH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method For Determining The Registration Of A Structure On A Photoma...
- Publication number 20120063666
- Publication date Mar 15, 2012
- Michael Arnz
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR MEASURING THE RELATIVE LOCAL POSITION ERROR O...
- Publication number 20110229010
- Publication date Sep 22, 2011
- CARL ZEISS SMS GMBH
- Michael Arnz
- B82 - NANO-TECHNOLOGY
Information Patent Application
AUTOFOCUS DEVICE AND AUTOFOCUSING METHOD FOR AN IMAGING DEVICE
- Publication number 20110134308
- Publication date Jun 9, 2011
- Michael Arnz
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR DETERMINING THE POSITION OF AN EDGE OF A MARK...
- Publication number 20100254611
- Publication date Oct 7, 2010
- CARL ZEISS SMS GMBH
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND M...
- Publication number 20100241384
- Publication date Sep 23, 2010
- CARL ZEISS SMS GMBH
- Alexander Huebel
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING SCATTERED LIGHT ON AN OPTICAL SY...
- Publication number 20100208254
- Publication date Aug 19, 2010
- Carl Zeiss SMT AG
- Michael ARNZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING THE RELATIVE OVERLAY SHIFT OF...
- Publication number 20100208935
- Publication date Aug 19, 2010
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK
- Publication number 20100153059
- Publication date Jun 17, 2010
- Gerd Klose
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING THE POSITION OF A STRUCTURE ON...
- Publication number 20100104128
- Publication date Apr 29, 2010
- Michael Arnz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE AND METHOD FOR RANGE-RESOLVED DETERMINATION OF SCATTERED LIG...
- Publication number 20080285018
- Publication date Nov 20, 2008
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device for the range-resolved determination of scattered light, ope...
- Publication number 20050264819
- Publication date Dec 1, 2005
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michael Arnz

Person

Patents Grantslast 30 patents

Method for determining the registration of a structure on a photoma...

Projection exposure apparatus with wavefront measuring device and o...

Test object for measuring the point spread function of an optical s...

Method and device for determining a lateral offset of a pattern on...

Measuring device for measuring an illumination property

Method for determining the registration of a structure on a photoma...

Grating-assisted autofocus device and autofocusing method for an im...

Autofocus device and autofocusing method for an imaging device

Method and device for determining the position of a first structure...

Method and device for measuring the relative local position error o...

Method and apparatus for the position determination of structures o...

Determination of the relative position of two structures

Method for calibrating a specimen stage of a metrology system and m...

Method and device for determining the position of an edge of a mark...

Method and apparatus for determining the position of a structure on...

Method and apparatus for determining the relative overlay shift of...

Method and apparatus for measuring scattered light on an optical sy...

Device and method for range-resolved determination of scattered lig...

Device for the range-resolved determination of scattered light, ope...

Moir&#x000E9; method and a system for measuring the distortion of a...

Patents Applicationslast 30 patents

PROJECTION EXPOSURE APPARATUS WITH WAVEFRONT MEASURING DEVICE AND O...

Method For Determining The Registration Of A Structure On A Photoma...

METHOD AND DEVICE FOR DETERMINING A LATERAL OFFSET OF A PATTERN ON...

TEST OBJECT FOR MEASURING THE POINT SPREAD FUNCTION OF AN OPTICAL S...

Measuring Device for Measuring an Illumination Property

Autofocus Device and Autofocussing Method For An Imaging Device

Method And Apparatus For The Position Determination Of Structures O...

METHOD AND DEVICE FOR DETERMINING THE POSITION OF A FIRST STRUCTURE...

DETERMINATION OF THE RELATIVE POSITION OF TWO STRUCTURES

Method For Determining The Registration Of A Structure On A Photoma...

METHOD AND DEVICE FOR MEASURING THE RELATIVE LOCAL POSITION ERROR O...

AUTOFOCUS DEVICE AND AUTOFOCUSING METHOD FOR AN IMAGING DEVICE

METHOD AND DEVICE FOR DETERMINING THE POSITION OF AN EDGE OF A MARK...

METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND M...

METHOD AND APPARATUS FOR MEASURING SCATTERED LIGHT ON AN OPTICAL SY...

METHOD AND APPARATUS FOR DETERMINING THE RELATIVE OVERLAY SHIFT OF...

APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK

METHOD AND APPARATUS FOR DETERMINING THE POSITION OF A STRUCTURE ON...

DEVICE AND METHOD FOR RANGE-RESOLVED DETERMINATION OF SCATTERED LIG...

Device for the range-resolved determination of scattered light, ope...

Moiré method and a system for measuring the distortion of a...