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Michael Baklanov
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Leuven, BE
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last 30 patents
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Patent Grant
Anisotropic etching of organic-containing insulating layers
Patent number
6,844,266
Issue date
Jan 18, 2005
Interuniversitair Microelektronica Centrum
Karen Maex
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Anisotropic etching of organic-containing insulating layers
Publication number
20030162407
Publication date
Aug 28, 2003
Karen Maex
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Anisotropic etching of organic-containing insulating layers
Publication number
20020076935
Publication date
Jun 20, 2002
Karen Maex
H01 - BASIC ELECTRIC ELEMENTS