Michael Beesely

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for supporting a wafer in a combined wafer support and tempe...
- Patent number 5,567,909
- Issue date Oct 22, 1996
- Applied Materials Inc.
- Michael N. Sugarman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combined wafer support and temperature monitoring device
- Patent number 5,356,486
- Issue date Oct 18, 1994
- Applied Materials, Inc.
- Michael N. Sugarman
- H01 - BASIC ELECTRIC ELEMENTS