Membership
Tour
Register
Log in
Michael Brauer
Follow
Person
Munchen, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of producing micromechanical structures
Patent number
6,839,962
Issue date
Jan 11, 2005
Infineon Technologies AG
Robert Aigner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Method for producing micromechanical structures
Publication number
20020170175
Publication date
Nov 21, 2002
Robert Aigner
B81 - MICRO-STRUCTURAL TECHNOLOGY