MICHAEL BRENNEN

Follow

Person

IRASBURG, VT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for semiconductor wafer leveling, force balanc...
- Patent number 10,580,678
- Issue date Mar 3, 2020
- Suss Microtec Lithography, GmbH
- Hale Johnson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for aligning and centering wafers
- Patent number 9,859,141
- Issue date Jan 2, 2018
- SUSS MicroTec Lithography GmbH
- Hale Johnson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for semiconductor wafer leveling, force balanc...
- Patent number 9,837,295
- Issue date Dec 5, 2017
- SUSS MicroTec Lithography GmbH
- Hale Johnson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and Method for Semiconductor Wafer Leveling, Force Balanc...
- Publication number 20180102270
- Publication date Apr 12, 2018
- SUSS MICROTEC LITHOGRAPHY, GMBH
- HALE JOHNSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR ALIGNING AND CENTERING WAFERS
- Publication number 20140319786
- Publication date Oct 30, 2014
- SUSS MICROTEC LITHOGRAPHY, GMBH
- HALE JOHNSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR SEMICONDUCTOR WAFER LEVELING, FORCE BALANC...
- Publication number 20140318683
- Publication date Oct 30, 2014
- HALE JOHNSON
- H01 - BASIC ELECTRIC ELEMENTS