Michael BRUGGER

Person

MILLSTATT, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for wafer wet processing
- Patent number 9,997,379
- Issue date Jun 12, 2018
- Lam Research AG
- Harald Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles
- Patent number 9,972,514
- Issue date May 15, 2018
- LAM RESEARCH AG
- Dietmar Hammer
- B08 - CLEANING
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 9,887,120
- Issue date Feb 6, 2018
- Lam Research AG
- Andreas Gleissner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles and heating...
- Patent number 9,685,358
- Issue date Jun 20, 2017
- Lam Research AG
- Ante Plazonic
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 9,536,770
- Issue date Jan 3, 2017
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles and heating...
- Patent number 9,245,777
- Issue date Jan 26, 2016
- Lam Research AG
- Ante Plazonic
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Grounded chuck
- Patent number 9,190,310
- Issue date Nov 17, 2015
- Lam Research AG
- Michael Brugger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 9,093,482
- Issue date Jul 28, 2015
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for treating wafer-shaped articles
- Patent number 8,974,632
- Issue date Mar 10, 2015
- Lam Research AG
- Ulrich Tschinderle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for wet treating plate-like-articles
- Patent number 8,936,832
- Issue date Jan 20, 2015
- Lam Research AG
- Michael Brugger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for wet treatment of plate-like articles
- Patent number 8,888,952
- Issue date Nov 18, 2014
- Lam Research AG
- Markus Gigacher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature chuck and method of using same
- Patent number 8,613,288
- Issue date Dec 24, 2013
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reinforced pin for being used in a pin chuck, and a pin chuck using...
- Patent number 8,608,146
- Issue date Dec 17, 2013
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for wet treating plate-like-articles
- Patent number 8,231,939
- Issue date Jul 31, 2012
- Lam Research AG
- Michael Brugger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for liquid treatment of wafer-shaped articles
- Patent number 8,029,641
- Issue date Oct 4, 2011
- Lam Research AG
- Andreas Baldy
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE
- Publication number 20240304489
- Publication date Sep 12, 2024
- LAM RESEARCH AG
- Burkhart SCHIER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR HOLDING A WAFER-SHAPED ARTICLE
- Publication number 20240290649
- Publication date Aug 29, 2024
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A WAFER
- Publication number 20230360952
- Publication date Nov 9, 2023
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE
- Publication number 20230298928
- Publication date Sep 21, 2023
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN CHUCK INCLUDING EDGE RING
- Publication number 20180096879
- Publication date Apr 5, 2018
- LAM RESEARCH AG
- Shih-Chung KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20180040502
- Publication date Feb 8, 2018
- LAM RESEARCH AG
- Shih-Chung KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20170256433
- Publication date Sep 7, 2017
- LAM RESEARCH AG
- Dietmar HAMMER
- B08 - CLEANING
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20170125281
- Publication date May 4, 2017
- LAM RESEARCH AG
- Andreas GLEISSNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING...
- Publication number 20160118278
- Publication date Apr 28, 2016
- LAM RESEARCH AG
- Ante Plazonic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20150200123
- Publication date Jul 16, 2015
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING...
- Publication number 20140339215
- Publication date Nov 20, 2014
- LAM RESEARCH AG
- Ante PLAZONIC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20140102637
- Publication date Apr 17, 2014
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20130233356
- Publication date Sep 12, 2013
- LAM RESEARCH AG
- Rainer OBWEGER
- B08 - CLEANING
Information Patent Application
DEVICE AND METHOD FOR TREATING WAFER-SHAPED ARTICLES
- Publication number 20130134128
- Publication date May 30, 2013
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR WAFER WET PROCESSING
- Publication number 20120131815
- Publication date May 31, 2012
- LAM RESEARCH AG
- Harald KRAUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES
- Publication number 20120085374
- Publication date Apr 12, 2012
- LAM RESEARCH AG
- Michael BRUGGER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GROUNDED CHUCK
- Publication number 20110254236
- Publication date Oct 20, 2011
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REINFORCED PIN FOR BEING USED IN A PIN CHUCK, AND A PIN CHUCK USING...
- Publication number 20110148022
- Publication date Jun 23, 2011
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE CHUCK AND METHOD OF USING SAME
- Publication number 20110146728
- Publication date Jun 23, 2011
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES
- Publication number 20110059242
- Publication date Mar 10, 2011
- SEZ AG
- Michael Brugger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR WET TREATMENT OF PLATE-LIKE ARTICLES
- Publication number 20100206481
- Publication date Aug 19, 2010
- SEZ AG
- Markus Gigacher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and Method For Liquid Treatment of Wafer-Shaped Articles
- Publication number 20080196835
- Publication date Aug 21, 2008
- SEZ AG
- Andreas Baldy
- H01 - BASIC ELECTRIC ELEMENTS

Michael BRUGGER

Person

Patents Grantslast 30 patents

Method and apparatus for wafer wet processing

Apparatus for liquid treatment of wafer shaped articles

Apparatus for treating surfaces of wafer-shaped articles

Apparatus for liquid treatment of wafer shaped articles and heating...

Method and apparatus for liquid treatment of wafer shaped articles

Apparatus for liquid treatment of wafer shaped articles and heating...

Grounded chuck

Method and apparatus for liquid treatment of wafer shaped articles

Device and method for treating wafer-shaped articles

Device and method for wet treating plate-like-articles

Apparatus for wet treatment of plate-like articles

High temperature chuck and method of using same

Reinforced pin for being used in a pin chuck, and a pin chuck using...

Device and method for wet treating plate-like-articles

Device and method for liquid treatment of wafer-shaped articles

Patents Applicationslast 30 patents

APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE

DEVICE FOR HOLDING A WAFER-SHAPED ARTICLE

APPARATUS FOR PROCESSING A WAFER

APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE

SPIN CHUCK INCLUDING EDGE RING

APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING...

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING...

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

DEVICE AND METHOD FOR TREATING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR WAFER WET PROCESSING

DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES

GROUNDED CHUCK

REINFORCED PIN FOR BEING USED IN A PIN CHUCK, AND A PIN CHUCK USING...

HIGH TEMPERATURE CHUCK AND METHOD OF USING SAME

DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES

APPARATUS FOR WET TREATMENT OF PLATE-LIKE ARTICLES

Device and Method For Liquid Treatment of Wafer-Shaped Articles