Michael Budach

Person

Hanau, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatuses for disposing of excess material of a photol...
- Patent number 11,874,598
- Issue date Jan 16, 2024
- Carl Zeiss SMT GmbH
- Michael Budach
- B08 - CLEANING
Information Patent Grant
Device and method for analyzing a defect of a photolithographic mas...
- Patent number 11,733,186
- Issue date Aug 22, 2023
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for determining a position of an element on a...
- Patent number 11,650,495
- Issue date May 16, 2023
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for examining and/or processing a sample
- Patent number 11,592,461
- Issue date Feb 28, 2023
- Carl Zeiss SMT GmbH
- Christof Baur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for determining a position of an element on a...
- Patent number 11,385,540
- Issue date Jul 12, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for examining and/or processing a sample
- Patent number 11,262,378
- Issue date Mar 1, 2022
- Carl Zeiss SMT GmbH
- Christof Baur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for repairing a photolithographic mask
- Patent number 11,256,168
- Issue date Feb 22, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and devices for examining an electrically charged specimen...
- Patent number 11,170,970
- Issue date Nov 9, 2021
- Carl Zeiss SMT GmbH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for analyzing a defective location of a photol...
- Patent number 11,150,552
- Issue date Oct 19, 2021
- Carl Zeiss SMT GmbH
- Michael Budach
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Device and method for analysing a defect of a photolithographic mas...
- Patent number 10,983,075
- Issue date Apr 20, 2021
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- G01 - MEASURING TESTING
Information Patent Grant
Beam blanker and method for blanking a charged particle beam
- Patent number 10,410,820
- Issue date Sep 10, 2019
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and devices for examining an electrically charged specimen...
- Patent number 10,068,747
- Issue date Sep 4, 2018
- Carl Zeiss SMT GmbH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for analyzing and for removing a defect of an...
- Patent number 10,060,947
- Issue date Aug 28, 2018
- Carl Zeiss SMT GmbH
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for examining a surface of a mask
- Patent number 9,910,065
- Issue date Mar 6, 2018
- Carl Zeiss SMT GmbH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for determining a reference point of an orientati...
- Patent number 9,863,760
- Issue date Jan 9, 2018
- Carl Zeiss SMT GmbH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining the performance of a photolithographic mask
- Patent number 9,431,212
- Issue date Aug 30, 2016
- Carl Zeiss SMS GmbH
- Markus Waiblinger
- G01 - MEASURING TESTING
Information Patent Grant
Scanning particle microscope and method for determining a position...
- Patent number 9,336,983
- Issue date May 10, 2016
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for investigating an object
- Patent number 9,115,981
- Issue date Aug 25, 2015
- Carl Zeiss SMS GmbH
- Christof Baur
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for analyzing and/or repairing of an EUV mask...
- Patent number 8,674,329
- Issue date Mar 18, 2014
- Carl Zeiss SMS GmbH
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Determining a repairing form of a defect at or close to an edge of...
- Patent number 8,316,698
- Issue date Nov 27, 2012
- NaWoTec GmbH
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for investigating and/or modifying a sample
- Patent number 8,247,782
- Issue date Aug 21, 2012
- Carl Zeiss SMS GmbH
- Klaus Edinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron microscope for inspecting and processing of an object with...
- Patent number 8,058,614
- Issue date Nov 15, 2011
- Carl Zeiss NTS GmbH
- Johannes Bihr
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron microscope for inspecting and processing of an object with...
- Patent number 7,645,989
- Issue date Jan 12, 2010
- Carl Zeiss NTS GmbH
- Johannes Bihr
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
- Publication number 20240310722
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CALIBRATING AN OPERATION ON A PHOTOMASK
- Publication number 20240310721
- Publication date Sep 19, 2024
- Cart Zeiss SMT GmbH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING OPTICAL PROPERTIES OF DEPOSITI...
- Publication number 20240219844
- Publication date Jul 4, 2024
- Carl Zeiss SMT GMBH
- Nicole Auth
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mesh Integrity Check
- Publication number 20240085171
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- David Laemmle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFE...
- Publication number 20240069434
- Publication date Feb 29, 2024
- Carl Zeiss SMT GMBH
- Christian Rensing
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...
- Publication number 20230238209
- Publication date Jul 27, 2023
- Carl Zeiss SMT GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
- Publication number 20230081844
- Publication date Mar 16, 2023
- Carl Zeiss SMT GMBH
- Thorsten Hofmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...
- Publication number 20220334469
- Publication date Oct 20, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220317564
- Publication date Oct 6, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220317565
- Publication date Oct 6, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
METHOD, DEVICE AND COMPUTER PROGRAM FOR REPAIRING A MASK DEFECT
- Publication number 20220308443
- Publication date Sep 29, 2022
- Carl Zeiss SMT GMBH
- Johannes Schöneberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220299864
- Publication date Sep 22, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE
- Publication number 20220178965
- Publication date Jun 9, 2022
- Carl Zeiss SMT GMBH
- Christof Baur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...
- Publication number 20210247336
- Publication date Aug 12, 2021
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES AND METHODS FOR EXAMINING AND/OR PROCESSING AN ELEMENT FOR...
- Publication number 20210132594
- Publication date May 6, 2021
- Carl Zeiss SMT GMBH
- Michael Budach
- G05 - CONTROLLING REGULATING
Information Patent Application
APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE
- Publication number 20210109126
- Publication date Apr 15, 2021
- Carl Zeiss SMT GMBH
- Christof Baur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR REPAIRING A PHOTOLITHOGRAPHIC MASK
- Publication number 20200249564
- Publication date Aug 6, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...
- Publication number 20200233299
- Publication date Jul 23, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20200103751
- Publication date Apr 2, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING A DEFECTIVE LOCATION OF A PHOTOL...
- Publication number 20200004138
- Publication date Jan 2, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND DEVICES FOR EXAMINING AN ELECTRICALLY CHARGED SPECIMEN...
- Publication number 20190035601
- Publication date Jan 31, 2019
- Carl Zeiss SMT GMBH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Application
BEAM BLANKER AND METHOD FOR BLANKING A CHARGED PARTICLE BEAM
- Publication number 20180151327
- Publication date May 31, 2018
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...
- Publication number 20180106831
- Publication date Apr 19, 2018
- Carl Zeiss SMT GMBH
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Application
DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...
- Publication number 20170292923
- Publication date Oct 12, 2017
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- G02 - OPTICS
Information Patent Application
METHODS AND DEVICES FOR EXAMINING AN ELECTRICALLY CHARGED SPECIMEN...
- Publication number 20170062180
- Publication date Mar 2, 2017
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR EXAMINING A SURFACE OF A MASK
- Publication number 20160341763
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR DETERMINING A REFERENCE POINT OF AN ORIENTATI...
- Publication number 20160138907
- Publication date May 19, 2016
- Carl Zeiss SMT GMBH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PARTICLE MICROSCOPE AND METHOD FOR DETERMINING A POSITION...
- Publication number 20150380210
- Publication date Dec 31, 2015
- CARL ZEISS SMS GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING B...
- Publication number 20140255831
- Publication date Sep 11, 2014
- Thorsten Hofmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...
- Publication number 20140165236
- Publication date Jun 12, 2014
- Michael Budach
- B82 - NANO-TECHNOLOGY

Michael Budach

Person

Patents Grantslast 30 patents

Method and apparatuses for disposing of excess material of a photol...

Device and method for analyzing a defect of a photolithographic mas...

Apparatus and method for determining a position of an element on a...

Apparatus and method for examining and/or processing a sample

Apparatus and method for determining a position of an element on a...

Apparatus and method for examining and/or processing a sample

Apparatus and method for repairing a photolithographic mask

Methods and devices for examining an electrically charged specimen...

Method and apparatus for analyzing a defective location of a photol...

Device and method for analysing a defect of a photolithographic mas...

Beam blanker and method for blanking a charged particle beam

Methods and devices for examining an electrically charged specimen...

Method and apparatus for analyzing and for removing a defect of an...

Apparatus and method for examining a surface of a mask

Method and device for determining a reference point of an orientati...

Method for determining the performance of a photolithographic mask

Scanning particle microscope and method for determining a position...

Apparatus and method for investigating an object

Method and apparatus for analyzing and/or repairing of an EUV mask...

Determining a repairing form of a defect at or close to an edge of...

Apparatus and method for investigating and/or modifying a sample

Electron microscope for inspecting and processing of an object with...

Electron microscope for inspecting and processing of an object with...

Patents Applicationslast 30 patents

METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

METHOD AND APPARATUS FOR CALIBRATING AN OPERATION ON A PHOTOMASK

METHOD AND APPARATUS FOR DETERMINING OPTICAL PROPERTIES OF DEPOSITI...

Mesh Integrity Check

METHOD AND APPARATUS FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFE...

APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...

METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...

APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHOD, DEVICE AND COMPUTER PROGRAM FOR REPAIRING A MASK DEFECT

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE

DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...

DEVICES AND METHODS FOR EXAMINING AND/OR PROCESSING AN ELEMENT FOR...

APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE

APPARATUS AND METHOD FOR REPAIRING A PHOTOLITHOGRAPHIC MASK

APPARATUS AND METHOD FOR DETERMINING A POSITION OF AN ELEMENT ON A...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHOD AND APPARATUS FOR ANALYZING A DEFECTIVE LOCATION OF A PHOTOL...

METHODS AND DEVICES FOR EXAMINING AN ELECTRICALLY CHARGED SPECIMEN...

BEAM BLANKER AND METHOD FOR BLANKING A CHARGED PARTICLE BEAM

METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...

DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...

METHODS AND DEVICES FOR EXAMINING AN ELECTRICALLY CHARGED SPECIMEN...

APPARATUS AND METHOD FOR EXAMINING A SURFACE OF A MASK

METHOD AND DEVICE FOR DETERMINING A REFERENCE POINT OF AN ORIENTATI...

SCANNING PARTICLE MICROSCOPE AND METHOD FOR DETERMINING A POSITION...

METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING B...

METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...