Michael C. Kellogg

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 12,100,575
- Issue date Sep 24, 2024
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 11,764,086
- Issue date Sep 19, 2023
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone gas injection upper electrode system
- Patent number 11,594,400
- Issue date Feb 28, 2023
- Lam Research Corporation
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 11,393,705
- Issue date Jul 19, 2022
- Lam Research Corporation
- John E. Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D printed plasma arrestor for an electrostatic chuck
- Patent number 11,227,749
- Issue date Jan 18, 2022
- Lam Research Corporation
- Michael Kellogg
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Systems and methods for achieving a pre-determined factor associate...
- Patent number 11,195,706
- Issue date Dec 7, 2021
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic gas distribution manifold and various construction techn...
- Patent number 10,914,003
- Issue date Feb 9, 2021
- Lam Research Corporation
- Andrew C. Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,825,656
- Issue date Nov 3, 2020
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 10,790,174
- Issue date Sep 29, 2020
- Lam Research Corporation
- John Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,665,435
- Issue date May 26, 2020
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone gas injection upper electrode system
- Patent number 10,622,195
- Issue date Apr 14, 2020
- Lam Research Corporation
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,615,003
- Issue date Apr 7, 2020
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic gas distribution manifold and various construction techn...
- Patent number 10,557,197
- Issue date Feb 11, 2020
- Lam Research Corporation
- Andrew C. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,395,902
- Issue date Aug 27, 2019
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving a pre-determined factor associate...
- Patent number 10,283,330
- Issue date May 7, 2019
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic manifold mask and substrate concepts
- Patent number 10,118,263
- Issue date Nov 6, 2018
- Lam Researech Corporation
- Michael C. Kellogg
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,115,568
- Issue date Oct 30, 2018
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,049,862
- Issue date Aug 14, 2018
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 10,037,869
- Issue date Jul 31, 2018
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 10,014,196
- Issue date Jul 3, 2018
- Lam Research Corporation
- John Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Service tunnel for use on capital equipment in semiconductor manufa...
- Patent number 9,929,028
- Issue date Mar 27, 2018
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 9,852,889
- Issue date Dec 26, 2017
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing chamber with flexible symmetric RF return strap
- Patent number 9,508,530
- Issue date Nov 29, 2016
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Service tunnel for use on capital equipment in semiconductor manufa...
- Patent number 9,502,275
- Issue date Nov 22, 2016
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual zone temperature control of upper electrodes
- Patent number 9,263,240
- Issue date Feb 16, 2016
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Consumable isolation ring for movable substrate support assembly of...
- Patent number 9,171,702
- Issue date Oct 27, 2015
- Lam Research Corporation
- Michael C. Kellogg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon containing confinement ring for plasma processing apparatus...
- Patent number 9,123,661
- Issue date Sep 1, 2015
- Lam Research Corporation
- Michael C. Kellogg
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Gas feed insert in a plasma processing chamber and methods therefor
- Patent number 9,111,731
- Issue date Aug 18, 2015
- Lam Research Corporation
- Anthony de la Llera
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pressure controlled heat pipe temperature control plate
- Patent number 8,975,817
- Issue date Mar 10, 2015
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Local plasma confinement and pressure control arrangement and metho...
- Patent number 8,900,398
- Issue date Dec 2, 2014
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
- Publication number 20240266151
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-SECTIONAL PLASMA CONFINEMENT RING STRUCTURE
- Publication number 20240234104
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
- Publication number 20240162015
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SU...
- Publication number 20230154772
- Publication date May 18, 2023
- LAM RESEARCH CORPORATION
- David William PAQUET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR ARRANGEMENT FOR SUBSTRATE PROCESSING TOOLS
- Publication number 20230085987
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Danny Arthur BROWN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS
- Publication number 20220344183
- Publication date Oct 27, 2022
- LAM RESEARCH CORPORATION
- David TRUSSELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS
- Publication number 20210005485
- Publication date Jan 7, 2021
- LAM RESEARCH CORPORATION
- John E. Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ring Structures and Systems for Use in a Plasma Chamber
- Publication number 20200365378
- Publication date Nov 19, 2020
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM
- Publication number 20200243307
- Publication date Jul 30, 2020
- LAM RESEARCH CORPORATION
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Controlling Directionality Of Ions In An Ed...
- Publication number 20200227238
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...
- Publication number 20200141002
- Publication date May 7, 2020
- LAM RESEARCH CORPORATION
- Andrew C. Lee
- B24 - GRINDING POLISHING
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20190371579
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATE...
- Publication number 20190244788
- Publication date Aug 8, 2019
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Controlling Directionality Of Ions In An Ed...
- Publication number 20190057839
- Publication date Feb 21, 2019
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20180323044
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20180323041
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Transport Assembly With Integrated Buffers
- Publication number 20180233387
- Publication date Aug 16, 2018
- LAM RESEARCH CORPORATION
- John DAUGHERTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Controlling Directionality Of Ions In An Ed...
- Publication number 20180082822
- Publication date Mar 22, 2018
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATE...
- Publication number 20180025891
- Publication date Jan 25, 2018
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D PRINTED PLASMA ARRESTOR FOR AN ELECTROSTATIC CHUCK
- Publication number 20170243726
- Publication date Aug 24, 2017
- LAM RESEARCH CORPORATION
- Michael Kellogg
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
SERVICE TUNNEL FOR USE ON CAPITAL EQUIPMENT IN SEMICONDUCTOR MANUFA...
- Publication number 20170110350
- Publication date Apr 20, 2017
- LAM RESEARCH CORPORATION
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS
- Publication number 20170110354
- Publication date Apr 20, 2017
- LAM RESEARCH CORPORATION
- John Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC MANIFOLD MASK AND SUBSTRATE CONCEPTS
- Publication number 20170057028
- Publication date Mar 2, 2017
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20160307743
- Publication date Oct 20, 2016
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE FOR MOUNTING GAS SUPPLY COMPONENTS AND METHODS THEREOF
- Publication number 20160111257
- Publication date Apr 21, 2016
- Lam Research Corporation
- Michael C. Kellogg
- B32 - LAYERED PRODUCTS
Information Patent Application
MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...
- Publication number 20160108523
- Publication date Apr 21, 2016
- LAM RESEARCH CORPORATION
- Andrew C. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOVABLE GROUND RING FOR MOVABLE SUBSTRATE SUPPORT ASSEMBLY OF A PLA...
- Publication number 20160050781
- Publication date Feb 18, 2016
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20160033977
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- G05 - CONTROLLING REGULATING
Information Patent Application
SILICON CONTAINING CONFINEMENT RING FOR PLASMA PROCESSING APPARATUS...
- Publication number 20150364322
- Publication date Dec 17, 2015
- LAM RESEARCH CORPORATION
- Michael C. KELLOGG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Devices Having Multi-Port Valve Assemblies
- Publication number 20150047785
- Publication date Feb 19, 2015
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS

Michael C. Kellogg

Person

Patents Grantslast 30 patents

Plasma processing devices having multi-port valve assemblies

Wafer transport assembly with integrated buffers

Multi zone gas injection upper electrode system

Wafer transport assembly with integrated buffers

3D printed plasma arrestor for an electrostatic chuck

Systems and methods for achieving a pre-determined factor associate...

Monolithic gas distribution manifold and various construction techn...

Systems and methods for controlling directionality of ions in an ed...

Wafer transport assembly with integrated buffers

Chamber with vertical support stem for symmetric conductance and RF...

Multi zone gas injection upper electrode system

Systems and methods for controlling directionality of ions in an ed...

Monolithic gas distribution manifold and various construction techn...

Chamber with vertical support stem for symmetric conductance and RF...

Systems and methods for achieving a pre-determined factor associate...

Monolithic manifold mask and substrate concepts

Systems and methods for controlling directionality of ions in an ed...

Chamber with vertical support stem for symmetric conductance and RF...

Plasma processing devices having multi-port valve assemblies

Wafer transport assembly with integrated buffers

Service tunnel for use on capital equipment in semiconductor manufa...

Systems and methods for controlling directionality of ions in an ed...

Plasma processing chamber with flexible symmetric RF return strap

Service tunnel for use on capital equipment in semiconductor manufa...

Dual zone temperature control of upper electrodes

Consumable isolation ring for movable substrate support assembly of...

Silicon containing confinement ring for plasma processing apparatus...

Gas feed insert in a plasma processing chamber and methods therefor

Pressure controlled heat pipe temperature control plate

Local plasma confinement and pressure control arrangement and metho...

Patents Applicationslast 30 patents

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

MULTI-SECTIONAL PLASMA CONFINEMENT RING STRUCTURE

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SU...

LINEAR ARRANGEMENT FOR SUBSTRATE PROCESSING TOOLS

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

Ring Structures and Systems for Use in a Plasma Chamber

MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM

Systems And Methods For Controlling Directionality Of Ions In An Ed...

MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATE...

Systems And Methods For Controlling Directionality Of Ions In An Ed...

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

Wafer Transport Assembly With Integrated Buffers

Systems And Methods For Controlling Directionality Of Ions In An Ed...

SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATE...

3D PRINTED PLASMA ARRESTOR FOR AN ELECTROSTATIC CHUCK

SERVICE TUNNEL FOR USE ON CAPITAL EQUIPMENT IN SEMICONDUCTOR MANUFA...

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

MONOLITHIC MANIFOLD MASK AND SUBSTRATE CONCEPTS

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

SUBSTRATE FOR MOUNTING GAS SUPPLY COMPONENTS AND METHODS THEREOF

MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...

MOVABLE GROUND RING FOR MOVABLE SUBSTRATE SUPPORT ASSEMBLY OF A PLA...

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

SILICON CONTAINING CONFINEMENT RING FOR PLASMA PROCESSING APPARATUS...

Plasma Processing Devices Having Multi-Port Valve Assemblies