Michael C. Kwan

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 11,733,035
- Issue date Aug 22, 2023
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- G01 - MEASURING TESTING
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 11,029,148
- Issue date Jun 8, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 10,648,802
- Issue date May 12, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 10,082,390
- Issue date Sep 25, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for non-destructive distribution profiling of an...
- Patent number 9,201,030
- Issue date Dec 1, 2015
- ReVera, Incorporated
- Paola deCecco
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for non-destructive distribution profiling of an...
- Patent number 8,916,823
- Issue date Dec 23, 2014
- ReVara, Incorporated
- Paolo deCecco
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for non-destructive distribution profiling of an...
- Patent number 8,610,059
- Issue date Dec 17, 2013
- Revera, Incorporated
- Paola deCecco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for non-destructive distribution profiling of an...
- Patent number 8,269,167
- Issue date Sep 18, 2012
- Revera, Incorporated
- Paola deCecco
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for non-destructive distribution profiling of an...
- Patent number 7,884,321
- Issue date Feb 8, 2011
- Revera, Incorporated
- Paola deCecco
- G01 - MEASURING TESTING
Information Patent Grant
Method of depositing an amorphous carbon film for etch hardmask app...
- Patent number 7,638,440
- Issue date Dec 29, 2009
- Applied Materials, Inc.
- Yuxiang May Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for non-destructive distribution profiling of an...
- Patent number 7,411,188
- Issue date Aug 12, 2008
- ReVera Incorporated
- Paola deCecco
- G01 - MEASURING TESTING
Information Patent Grant
Liquid precursors for the CVD deposition of amorphous carbon films
- Patent number 7,407,893
- Issue date Aug 5, 2008
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing gate stack sidewall spacers
- Patent number 7,253,123
- Issue date Aug 7, 2007
- Applied Materials, Inc.
- Reza Arghavani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for high aspect ratio HDP CVD gapfill
- Patent number 7,064,077
- Issue date Jun 20, 2006
- Applied Materials
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP...
- Patent number 7,052,552
- Issue date May 30, 2006
- Applied Materials
- Michael Kwan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for high aspect ratio HDP CVD gapfill
- Patent number 6,812,153
- Issue date Nov 2, 2004
- Applied Materials Inc.
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cleaning a semiconductor wafer processing...
- Patent number 6,715,496
- Issue date Apr 6, 2004
- Applied Materials Inc.
- Michael Chiu Kwan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning a semiconductor wafer processing...
- Patent number 6,596,123
- Issue date Jul 22, 2003
- Applied Materials, Inc.
- Michael Chiu Kwan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP...
- Patent number 6,335,288
- Issue date Jan 1, 2002
- Applied Materials, Inc.
- Michael Kwan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20240085174
- Publication date Mar 14, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20210372787
- Publication date Dec 2, 2021
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20200370885
- Publication date Nov 26, 2020
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20190360800
- Publication date Nov 28, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20190033069
- Publication date Jan 31, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
Feed-Forward of Multi-Layer and Multi-Process Information using XPS...
- Publication number 20170160081
- Publication date Jun 8, 2017
- ReVera, Incorporated
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN...
- Publication number 20150069230
- Publication date Mar 12, 2015
- Paola deCecco
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN...
- Publication number 20140070096
- Publication date Mar 13, 2014
- Paolo deCecco
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN...
- Publication number 20120318974
- Publication date Dec 20, 2012
- Paola deCecco
- G01 - MEASURING TESTING
Information Patent Application
Mixing Energized and Non-Energized Gases for Silicon Nitride Deposi...
- Publication number 20120009803
- Publication date Jan 12, 2012
- Applied Materials, Inc.
- Kee Bum Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN...
- Publication number 20110144787
- Publication date Jun 16, 2011
- Paola deCecco
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Method and system for non-destructive distribution profiling of an...
- Publication number 20080283743
- Publication date Nov 20, 2008
- Paola deCecco
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Method and system for non-destructive distribution profiling of an...
- Publication number 20070010973
- Publication date Jan 11, 2007
- Paola deCecco
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Mixing energized and non-energized gases for silicon nitride deposi...
- Publication number 20060162661
- Publication date Jul 27, 2006
- APPLIED MATERIALS, INC.
- Kee Bum Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing gate stack sidewall spacers
- Publication number 20060154493
- Publication date Jul 13, 2006
- Reza Arghavani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tensile and compressive stressed materials for semiconductors
- Publication number 20060105106
- Publication date May 18, 2006
- APPLIED MATERIALS, INC.
- Mihaela Balseanu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid precursors for the CVD deposition of amorphous carbon films
- Publication number 20050287771
- Publication date Dec 29, 2005
- APPLIED MATERIALS, INC.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of depositing an amorphous carbon film for metal etch hardma...
- Publication number 20050199585
- Publication date Sep 15, 2005
- APPLIED MATERIALS, INC.
- Yuxiang May Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of depositing an amorphous carbon film for etch hardmask app...
- Publication number 20050202683
- Publication date Sep 15, 2005
- APPLIED MATERIALS, INC.
- Yuxiang May Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for high aspect ratio HDP CVD gapfill
- Publication number 20050079715
- Publication date Apr 14, 2005
- Applied Materials, Inc.
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for high aspect ratio HDP CVD gapfill
- Publication number 20030203637
- Publication date Oct 30, 2003
- Applied Materials, Inc.
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for cleaning a semiconductor wafer processing...
- Publication number 20030164224
- Publication date Sep 4, 2003
- Michael Chiu Kwan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP...
- Publication number 20020040764
- Publication date Apr 11, 2002
- Applied Materials, Inc.
- Michael Kwan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Michael C. Kwan

Person

Patents Grantslast 30 patents

Feed-forward of multi-layer and multi-process information using XPS...

Feed-forward of multi-layer and multi-process information using XPS...

Feed-forward of multi-layer and multi-process information using XPS...

Feed-forward of multi-layer and multi-process information using XPS...

Method and system for non-destructive distribution profiling of an...

Method and system for non-destructive distribution profiling of an...

Method and system for non-destructive distribution profiling of an...

Method and system for non-destructive distribution profiling of an...

Method and system for non-destructive distribution profiling of an...

Method of depositing an amorphous carbon film for etch hardmask app...

Method and system for non-destructive distribution profiling of an...

Liquid precursors for the CVD deposition of amorphous carbon films

Method for producing gate stack sidewall spacers

Method for high aspect ratio HDP CVD gapfill

Gas chemistry cycling to achieve high aspect ratio gapfill with HDP...

Method for high aspect ratio HDP CVD gapfill

Method and apparatus for cleaning a semiconductor wafer processing...

Method and apparatus for cleaning a semiconductor wafer processing...

Gas chemistry cycling to achieve high aspect ratio gapfill with HDP...

Patents Applicationslast 30 patents

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

Feed-Forward of Multi-Layer and Multi-Process Information using XPS...

METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN...

METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN...

METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN...

Mixing Energized and Non-Energized Gases for Silicon Nitride Deposi...

METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN...

Method and system for non-destructive distribution profiling of an...

Method and system for non-destructive distribution profiling of an...

Mixing energized and non-energized gases for silicon nitride deposi...

Method for producing gate stack sidewall spacers

Tensile and compressive stressed materials for semiconductors

Liquid precursors for the CVD deposition of amorphous carbon films

Method of depositing an amorphous carbon film for metal etch hardma...

Method of depositing an amorphous carbon film for etch hardmask app...

Method for high aspect ratio HDP CVD gapfill

Method for high aspect ratio HDP CVD gapfill

Method and apparatus for cleaning a semiconductor wafer processing...

Gas chemistry cycling to achieve high aspect ratio gapfill with HDP...