Michael C. Matter

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electron optics for multi-beam electron beam lithography tool
- Patent number 6,617,587
- Issue date Sep 9, 2003
- Multibeam Systems, Inc.
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electron optics for multi-beam electron beam lithography tool
- Publication number 20040119021
- Publication date Jun 24, 2004
- Ion Diagnostics
- N. William Parker
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON OPTICS FOR MULTI-BEAM ELECTRON BEAM LITHOGRAPHY TOOL
- Publication number 20030085360
- Publication date May 8, 2003
- Multibeam Systems, Inc.
- N. William Parker
- B82 - NANO-TECHNOLOGY