Michael Carcasi

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Bath systems and methods thereof
- Patent number 12,226,796
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Michael Carcasi
- B08 - CLEANING
Information Patent Grant
Chemical amplification methods and techniques for developable botto...
- Patent number 12,165,870
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Steven Scheer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal imaging sensor for integration into track system
- Patent number 12,123,778
- Issue date Oct 22, 2024
- Tokyo Electron Limited
- Michael Carcasi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Methods and systems to monitor, control, and synchronize dispense s...
- Patent number 11,998,945
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Joshua Hooge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bath systems and methods thereof
- Patent number 11,738,363
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Michael Carcasi
- B08 - CLEANING
Information Patent Grant
System and method to calibrate a plurality of wafer inspection syst...
- Patent number 11,703,459
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for spin process video analysis during substrat...
- Patent number 11,637,031
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Hardware improvements and methods for the analysis of a spinning re...
- Patent number 11,624,607
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for monitoring one or more characteristics of a...
- Patent number 11,474,028
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods to monitor particulate accumulation for bake ch...
- Patent number 11,339,733
- Issue date May 24, 2022
- Tokyo Electron Limited
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for automated video analysis detection techniqu...
- Patent number 11,276,157
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Joel Estrella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method of planarization control using a cross-linkable m...
- Patent number 11,262,657
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hardware improvements and methods for the analysis of a spinning re...
- Patent number 11,168,978
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Grant
Method and process for stochastic driven detectivity healing
- Patent number 11,163,236
- Issue date Nov 2, 2021
- Tokyo Electron Limited
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for sensitizing photoresist using flood exposures
- Patent number 11,061,332
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Michael A. Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for developer drain line monitoring
- Patent number 10,809,620
- Issue date Oct 20, 2020
- Tokyo Electron Limited
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension control by use of photo-sensitized chemicals or...
- Patent number 10,551,743
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Michael A. Carcasi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and techniques to use with photosensitized chemically ampli...
- Patent number 10,534,266
- Issue date Jan 14, 2020
- Tokyo Electron Limited
- Michael A. Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension control by use of a photo agent
- Patent number 10,522,428
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Anton J. deVilliers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photo-sensitized chemically amplified resist (PS-CAR) simulation
- Patent number 10,429,745
- Issue date Oct 1, 2019
- Osaka University
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension control by use of a photo agent
- Patent number 10,096,528
- Issue date Oct 9, 2018
- Tokyo Electron Limited
- Anton J. deVilliers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photo-sensitized chemically amplified resist (PS-CAR) model calibra...
- Patent number 10,048,594
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for increased recirculation and filtration in...
- Patent number 10,048,587
- Issue date Aug 14, 2018
- TOKYO ELECTRON LIMITED
- Michael Andrew Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chemical amplification methods and techniques for developable botto...
- Patent number 10,020,195
- Issue date Jul 10, 2018
- Tokyo Electron Limited
- Steven Scheer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hot plate with programmable array of lift devices for multi-bake pr...
- Patent number 9,978,618
- Issue date May 22, 2018
- Tokyo Electron Limited
- Mark Somervell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate rinsing and drying
- Patent number 9,786,523
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Carlos A Fonseca
- B08 - CLEANING
Information Patent Grant
Mitigation of EUV shot noise replicating into acid shot noise in ph...
- Patent number 9,746,774
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Michael A. Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and techniques to use with photosensitized chemically ampli...
- Patent number 9,618,848
- Issue date Apr 11, 2017
- Tokyo Electron Limited
- Michael A. Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integration of absorption based heating bake methods into a photoli...
- Patent number 9,613,801
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Michael A. Carcasi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Exposure dose homogenization through rotation, translation, and var...
- Patent number 9,612,534
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Mark L. Schattenburg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A FLUID HEIGHT AND/OR A FLUID V...
- Publication number 20240421009
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A...
- Publication number 20240420973
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...
- Publication number 20240420974
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE ENERGY MODIFICATION IN HYBRID BONDING
- Publication number 20240128212
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Joshua Hooge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Bath Systems and Methods Thereof
- Publication number 20230356255
- Publication date Nov 9, 2023
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B08 - CLEANING
Information Patent Application
PROVIDING A BARRIER LAYER FOR PHOTORESIST PROCESSING
- Publication number 20230259030
- Publication date Aug 17, 2023
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BATH IMAGING
- Publication number 20220405902
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Joel Estrella
- B08 - CLEANING
Information Patent Application
Bath Systems and Methods Thereof
- Publication number 20220388022
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B08 - CLEANING
Information Patent Application
SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK
- Publication number 20220269177
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Thermal Imaging Sensor for Integration into Track System
- Publication number 20210285822
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Application
Hardware Improvements and Methods for the Analysis of a Spinning Re...
- Publication number 20210210392
- Publication date Jul 8, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hardware Improvements and Methods for the Analysis of a Spinning Re...
- Publication number 20210207951
- Publication date Jul 8, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Systems and Methods for Automated Video Analysis Detection Techniqu...
- Publication number 20210150697
- Publication date May 20, 2021
- TOKYO ELECTRON LIMITED
- Joel Estrella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210129166
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE S...
- Publication number 20210132637
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Joshua Hooge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE S...
- Publication number 20210129174
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Joshua Hooge
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210134637
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEM AND METHOD TO CALIBRATE A PLURALITY OF WAFER INSPECTION SYST...
- Publication number 20210131977
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Monitoring One or More Characteristics of a...
- Publication number 20210109015
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS TO MONITOR PARTICULATE ACCUMULATION FOR BAKE CH...
- Publication number 20210071607
- Publication date Mar 11, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
Method and Process for Stochastic Driven Defectivity Healing
- Publication number 20210048749
- Publication date Feb 18, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD OF PLANARIZATION CONTROL USING A CROSS-LINKABLE M...
- Publication number 20210018839
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MULTIPLE RECIRCULATION AND FILTRATION CYCL...
- Publication number 20200348596
- Publication date Nov 5, 2020
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR SENSITIZING PHOTORESIST USING FLOOD EXPOSURES
- Publication number 20190094698
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Michael A. Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CRITICAL DIMENSION CONTROL BY USE OF A PHOTO AGENT
- Publication number 20190043765
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Anton J. deVilliers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL AMPLIFICATION METHODS AND TECHNIQUES FOR DEVELOPABLE BOTTO...
- Publication number 20180315596
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Steven Scheer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Hot plate with programmable array of lift devices for multi-bake pr...
- Publication number 20180102265
- Publication date Apr 12, 2018
- Mark Somervell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRITICAL DIMENSION CONTROL BY USE OF PHOTO-SENSITIZED CHEMICALS OR...
- Publication number 20170329229
- Publication date Nov 16, 2017
- TOKYO ELECTRON LIMITED
- Michael A. Carcasi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CRITICAL DIMENSION CONTROL BY USE OF A PHOTO AGENT
- Publication number 20170330806
- Publication date Nov 16, 2017
- TOKYO ELECTRON LIMITED
- Anton J. deVilliers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of evaluating aligned patterns in directed self-assembly and...
- Publication number 20170287126
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G06 - COMPUTING CALCULATING COUNTING

Michael Carcasi

Person

Patents Grantslast 30 patents

Bath systems and methods thereof

Chemical amplification methods and techniques for developable botto...

Thermal imaging sensor for integration into track system

Methods and systems to monitor, control, and synchronize dispense s...

Bath systems and methods thereof

System and method to calibrate a plurality of wafer inspection syst...

Systems and methods for spin process video analysis during substrat...

Hardware improvements and methods for the analysis of a spinning re...

Systems and methods for monitoring one or more characteristics of a...

Systems and methods to monitor particulate accumulation for bake ch...

Systems and methods for automated video analysis detection techniqu...

System and method of planarization control using a cross-linkable m...

Hardware improvements and methods for the analysis of a spinning re...

Method and process for stochastic driven detectivity healing

Methods for sensitizing photoresist using flood exposures

Systems and methods for developer drain line monitoring

Critical dimension control by use of photo-sensitized chemicals or...

Methods and techniques to use with photosensitized chemically ampli...

Critical dimension control by use of a photo agent

Photo-sensitized chemically amplified resist (PS-CAR) simulation

Critical dimension control by use of a photo agent

Photo-sensitized chemically amplified resist (PS-CAR) model calibra...

Method and apparatus for increased recirculation and filtration in...

Chemical amplification methods and techniques for developable botto...

Hot plate with programmable array of lift devices for multi-bake pr...

Method and apparatus for substrate rinsing and drying

Mitigation of EUV shot noise replicating into acid shot noise in ph...

Methods and techniques to use with photosensitized chemically ampli...

Integration of absorption based heating bake methods into a photoli...

Exposure dose homogenization through rotation, translation, and var...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR DETERMINING A FLUID HEIGHT AND/OR A FLUID V...

SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A...

SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...

SURFACE ENERGY MODIFICATION IN HYBRID BONDING

Bath Systems and Methods Thereof

PROVIDING A BARRIER LAYER FOR PHOTORESIST PROCESSING

WAFER BATH IMAGING

Bath Systems and Methods Thereof

SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK

Thermal Imaging Sensor for Integration into Track System

Hardware Improvements and Methods for the Analysis of a Spinning Re...

Hardware Improvements and Methods for the Analysis of a Spinning Re...

Systems and Methods for Automated Video Analysis Detection Techniqu...

Systems and Methods for Spin Process Video Analysis During Substrat...

METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE S...

METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE S...

Systems and Methods for Spin Process Video Analysis During Substrat...

SYSTEM AND METHOD TO CALIBRATE A PLURALITY OF WAFER INSPECTION SYST...

Systems and Methods for Monitoring One or More Characteristics of a...

SYSTEMS AND METHODS TO MONITOR PARTICULATE ACCUMULATION FOR BAKE CH...

Method and Process for Stochastic Driven Defectivity Healing

SYSTEM AND METHOD OF PLANARIZATION CONTROL USING A CROSS-LINKABLE M...

METHOD AND APPARATUS FOR MULTIPLE RECIRCULATION AND FILTRATION CYCL...

METHODS FOR SENSITIZING PHOTORESIST USING FLOOD EXPOSURES

CRITICAL DIMENSION CONTROL BY USE OF A PHOTO AGENT

CHEMICAL AMPLIFICATION METHODS AND TECHNIQUES FOR DEVELOPABLE BOTTO...

Hot plate with programmable array of lift devices for multi-bake pr...

CRITICAL DIMENSION CONTROL BY USE OF PHOTO-SENSITIZED CHEMICALS OR...

CRITICAL DIMENSION CONTROL BY USE OF A PHOTO AGENT

Method of evaluating aligned patterns in directed self-assembly and...