Michael Carl

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for characterizing the surface shape of an optica...
- Patent number 11,927,500
- Issue date Mar 12, 2024
- Carl Zeiss SMT GmbH
- Steffen Siegler
- G01 - MEASURING TESTING
Information Patent Grant
Method and assembly for characterizing a mask or a wafer for microl...
- Patent number 11,269,260
- Issue date Mar 8, 2022
- Carl Zeiss SMT GmbH
- Michael Carl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system of a microlithographic projection exposure system or...
- Patent number 10,620,542
- Issue date Apr 14, 2020
- Carl Zeiss SMT GmbH
- Michael Carl
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...
- Publication number 20220236139
- Publication date Jul 28, 2022
- Carl Zeiss SMT GMBH
- Steffen SIEGLER
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND ASSEMBLY FOR CHARACTERIZING A MASK OR A WAFER FOR MICROL...
- Publication number 20210157243
- Publication date May 27, 2021
- Carl Zeiss SMT GMBH
- Michael Carl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM OR...
- Publication number 20180253013
- Publication date Sep 6, 2018
- Carl Zeiss SMT GMBH
- Michael Carl
- G01 - MEASURING TESTING