Michael Clarke

Person

  • Bedford, MA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Apparatus and method for conditioning an immersion fluid

    • Publication number 20090316119
    • Publication date Dec 24, 2009
    • Bipin S. Parekh
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Application

    Liquid filtration device

    • Publication number 20080302712
    • Publication date Dec 11, 2008
    • Entegris, Inc.
    • Marc Laverdiere
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    System and Method for Non-Intrusive Thermal Monitor

    • Publication number 20080225925
    • Publication date Sep 18, 2008
    • Entegris, Inc.
    • Marc Laverdiere
    • G01 - MEASURING TESTING
  • Information Patent Application

    SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE

    • Publication number 20080185044
    • Publication date Aug 7, 2008
    • Entegris, Inc.
    • Michael Clarke
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Systems and methods for fluid flow control in an immersion lithogra...

    • Publication number 20080036985
    • Publication date Feb 14, 2008
    • Michael Clarke
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Liquid filtration device

    • Publication number 20070107601
    • Publication date May 17, 2007
    • Marc Laverdiere
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Liquid filtration device

    • Publication number 20060070961
    • Publication date Apr 6, 2006
    • Marc Laverdiere
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Liquid filtration device

    • Publication number 20050145577
    • Publication date Jul 7, 2005
    • Mykrolis Corporation
    • Marc Laverdiere
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Liquid filtration device

    • Publication number 20040094463
    • Publication date May 20, 2004
    • Marc Laverdiere
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL