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Michael Clarke
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Bedford, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for non-intrusive thermal monitor
Patent number
7,726,876
Issue date
Jun 1, 2010
Entegris, Inc.
Marc Laverdiere
G01 - MEASURING TESTING
Information
Patent Grant
Liquid filtration device
Patent number
7,572,367
Issue date
Aug 11, 2009
Entegris, Inc.
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Systems and methods for fluid flow control in an immersion lithogra...
Patent number
7,443,483
Issue date
Oct 28, 2008
Entegris, Inc.
Michael Clarke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid filtration device
Patent number
7,407,594
Issue date
Aug 5, 2008
Entegris, Inc.
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Liquid filtration device
Patent number
6,982,041
Issue date
Jan 3, 2006
Mykrolis Corporation
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Liquid filtration device
Patent number
6,846,409
Issue date
Jan 25, 2005
Mykrolis Corporation
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Process for coating a solid surface with a liquid composition
Patent number
6,428,852
Issue date
Aug 6, 2002
Mykrolis Corporation
John E. Pillion
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and method for conditioning an immersion fluid
Publication number
20090316119
Publication date
Dec 24, 2009
Bipin S. Parekh
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Liquid filtration device
Publication number
20080302712
Publication date
Dec 11, 2008
Entegris, Inc.
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
System and Method for Non-Intrusive Thermal Monitor
Publication number
20080225925
Publication date
Sep 18, 2008
Entegris, Inc.
Marc Laverdiere
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE
Publication number
20080185044
Publication date
Aug 7, 2008
Entegris, Inc.
Michael Clarke
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Systems and methods for fluid flow control in an immersion lithogra...
Publication number
20080036985
Publication date
Feb 14, 2008
Michael Clarke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Liquid filtration device
Publication number
20070107601
Publication date
May 17, 2007
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Liquid filtration device
Publication number
20060070961
Publication date
Apr 6, 2006
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Liquid filtration device
Publication number
20050145577
Publication date
Jul 7, 2005
Mykrolis Corporation
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Liquid filtration device
Publication number
20040094463
Publication date
May 20, 2004
Marc Laverdiere
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL