Michael D. Johnson

Person

  • Peabody, MA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Dual cathode ion source

    • Patent number 11,114,277
    • Issue date Sep 7, 2021
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion beam quality control using a movable mass resolving device

    • Patent number 11,049,691
    • Issue date Jun 29, 2021
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dual cathode ion source

    • Patent number 10,741,361
    • Issue date Aug 11, 2020
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dual cathode ion source

    • Patent number 10,446,372
    • Issue date Oct 15, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dual cathode ion source

    • Patent number 9,978,554
    • Issue date May 22, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Dual Cathode Ion Source

    • Publication number 20200294765
    • Publication date Sep 17, 2020
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dual Cathode Ion Source

    • Publication number 20190385811
    • Publication date Dec 19, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Beam Quality Control Using A Movable Mass Resolving Device

    • Publication number 20190198292
    • Publication date Jun 27, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dual Cathode Ion Source

    • Publication number 20180211808
    • Publication date Jul 26, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS