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Michael D. Johnson
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Peabody, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Dual cathode ion source
Patent number
11,114,277
Issue date
Sep 7, 2021
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam quality control using a movable mass resolving device
Patent number
11,049,691
Issue date
Jun 29, 2021
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual cathode ion source
Patent number
10,741,361
Issue date
Aug 11, 2020
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual cathode ion source
Patent number
10,446,372
Issue date
Oct 15, 2019
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual cathode ion source
Patent number
9,978,554
Issue date
May 22, 2018
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Dual Cathode Ion Source
Publication number
20200294765
Publication date
Sep 17, 2020
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dual Cathode Ion Source
Publication number
20190385811
Publication date
Dec 19, 2019
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Beam Quality Control Using A Movable Mass Resolving Device
Publication number
20190198292
Publication date
Jun 27, 2019
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dual Cathode Ion Source
Publication number
20180211808
Publication date
Jul 26, 2018
Varian Semiconductor Equipment Associates, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS