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Michael David Caudill
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San Diego, CA, US
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last 30 patents
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Patent Grant
Adaptive laser system for an extreme ultraviolet light source
Patent number
9,380,691
Issue date
Jun 28, 2016
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
ADAPTIVE LASER SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20150250045
Publication date
Sep 3, 2015
ASML NETHERLANDS B.V.
Yezheng Tao
H01 - BASIC ELECTRIC ELEMENTS