Michael Dickens

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Danville, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing chamber component having adaptive thermal conductor
- Patent number 8,529,729
- Issue date Sep 10, 2013
- Lam Research Corporation
- Tom Stevenson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrical heating systems
- Patent number 6,005,228
- Issue date Dec 21, 1999
- Michael D. Dickens
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING CHAMBER COMPONENT HAVING ADAPTIVE THERMAL CONDUCTOR
- Publication number 20110300714
- Publication date Dec 8, 2011
- LAM RESEARCH CORPORATION
- Tom Stevenson
- H01 - BASIC ELECTRIC ELEMENTS