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Michael Doelle
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Milpitas, CA, US
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last 30 patents
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Patent Grant
Stress-sensitive micro-electromechanical device and use thereof
Patent number
8,916,944
Issue date
Dec 23, 2014
Elmos Semiconductor AG
Bernd Burchard
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MICRO-ELECTROMECHANICAL DEVICE AND USE THEREOF
Publication number
20130193535
Publication date
Aug 1, 2013
Silicon Microstructures, Inc.
Bernd Burchard
B81 - MICRO-STRUCTURAL TECHNOLOGY