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Michael Duhamel
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Acton, MA, US
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last 30 patents
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Patent Grant
Substrate transport apparatus with active edge gripper
Patent number
10,204,811
Issue date
Feb 12, 2019
Brooks Automation, Inc.
Michael Duhamel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transport apparatus with active edge gripper
Patent number
8,628,288
Issue date
Jan 14, 2014
Brooks Automation, Inc.
Michael Duhamel
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate transport apparatus with active edge gripper
Patent number
8,167,522
Issue date
May 1, 2012
Brooks Automation, Inc.
Michael Duhamel
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
Publication number
20140119856
Publication date
May 1, 2014
Brooks Automation, Inc.
Michael Duhamel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
Publication number
20120189406
Publication date
Jul 26, 2012
Brooks Automation, Inc.
Michael Duhamel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate transport apparatus with active edge gripper
Publication number
20060222480
Publication date
Oct 5, 2006
Michael A. Duhamel
H01 - BASIC ELECTRIC ELEMENTS