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Michael E. Givens
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Scottsdale, AZ, US
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last 30 patents
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Patent Grant
Substrate processing apparatus and method
Patent number
12,169,361
Issue date
Dec 17, 2024
ASM IP Holding B.V.
Ivo Raaijmakers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
Patent number
12,094,936
Issue date
Sep 17, 2024
ASM IP Holding B.V.
Fu Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Structures including metal carbide material, devices including the...
Patent number
11,926,895
Issue date
Mar 12, 2024
ASM IP Holding B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
Patent number
11,798,999
Issue date
Oct 24, 2023
ASM IP Holding B.V.
Fu Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a photoresist underlayer and structure including...
Patent number
11,735,422
Issue date
Aug 22, 2023
ASM IP Holding B.V.
Ivan Zyulkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming structures including a vanadium or indium layer
Patent number
11,521,851
Issue date
Dec 6, 2022
ASM IP Holding B.V.
Eric James Shero
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
Patent number
11,411,088
Issue date
Aug 9, 2022
ASM IP Holding B.V.
Fu Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Structures including metal carbide material, devices including the...
Patent number
11,242,598
Issue date
Feb 8, 2022
ASM IP Holding B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for forming a semiconductor device structure and related se...
Patent number
11,164,955
Issue date
Nov 2, 2021
ASM IP Holding B.V.
Chiyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Titanium aluminum and tantalum aluminum thin films
Patent number
11,139,383
Issue date
Oct 5, 2021
ASM IP Holding B.V.
Suvi Haukka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a germanium oxynitride film
Patent number
11,101,370
Issue date
Aug 24, 2021
ASM IP Holding B.V.
Fu Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition of metal borides and silicides
Patent number
10,865,475
Issue date
Dec 15, 2020
ASM IP Holding B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sulfur-containing thin films
Patent number
10,854,444
Issue date
Dec 1, 2020
ASM IP Holding B.V.
Suvi P. Haukka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
Patent number
10,818,758
Issue date
Oct 27, 2020
ASM IP Holding B.V.
Fu Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a semiconductor device structure and related se...
Patent number
10,734,497
Issue date
Aug 4, 2020
ASM IP Holding B.V.
Chiyu Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a transition metal nitride film on a substrate...
Patent number
10,720,331
Issue date
Jul 21, 2020
ASM IP Holdings, B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Source/drain performance through conformal solid state doping
Patent number
10,665,452
Issue date
May 26, 2020
ASM IP Holdings B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a semiconductor device and related semiconducto...
Patent number
10,643,904
Issue date
May 5, 2020
ASM IP Holdings B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Titanium aluminum and tantalum aluminum thin films
Patent number
10,636,889
Issue date
Apr 28, 2020
ASM IP Holding B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming a semiconductor device structure comprising a ga...
Patent number
10,607,895
Issue date
Mar 31, 2020
ASM IP Holdings B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for dynamic semiconductor process scheduling
Patent number
10,566,223
Issue date
Feb 18, 2020
ASM IP Holdings B.V.
Keith R. Lawson
G05 - CONTROLLING REGULATING
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Patent Grant
Sulfur-containing thin films
Patent number
10,553,424
Issue date
Feb 4, 2020
ASM IP Holding B.V.
Suvi P. Haukka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for semiconductor passivation by nitridation after oxide re...
Patent number
10,490,475
Issue date
Nov 26, 2019
ASM IP Holding B.V.
Qi Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Structures including metal carbide material, devices including the...
Patent number
10,458,018
Issue date
Oct 29, 2019
ASM IP Holding B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a germanium oxynitride film
Patent number
10,367,080
Issue date
Jul 30, 2019
ASM IP Holding B.V.
Fu Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a transition metal nitride film on a substrate...
Patent number
10,229,833
Issue date
Mar 12, 2019
ASM IP Holding B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sulfur-containing thin films
Patent number
10,199,213
Issue date
Feb 5, 2019
ASM IP Holding B.V.
Suvi P. Haukka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition of metal borides
Patent number
10,087,522
Issue date
Oct 2, 2018
ASM IP Holding B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Source/drain performance through conformal solid state doping
Patent number
10,032,628
Issue date
Jul 24, 2018
ASM IP Holding B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Titanium aluminum and tantalum aluminum thin films
Patent number
10,002,936
Issue date
Jun 19, 2018
ASM IP Holding B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SEM...
Publication number
20240096711
Publication date
Mar 21, 2024
ASM IP HOLDING B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...
Publication number
20240030296
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
Fu Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A PHOTORESIST UNDERLAYER AND STRUCTURE INCLUDING...
Publication number
20230420256
Publication date
Dec 28, 2023
ASM IP HOLDING B.V.
Ivan Zyulkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING STRUCTURES INCLUDING A VANADIUM OR INDIUM LAYER
Publication number
20230078233
Publication date
Mar 16, 2023
ASM IP HOLDING B.V.
Eric James Shero
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...
Publication number
20220367647
Publication date
Nov 17, 2022
ASM IP HOLDING B.V.
Fu Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STRUCTURES INCLUDING METAL CARBIDE MATERIAL, DEVICES INCLUDING THE...
Publication number
20220149175
Publication date
May 12, 2022
ASM IP HOLDING B.V.
Petri Raisanen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
Publication number
20210399111
Publication date
Dec 23, 2021
ASM IP HOLDING B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING STRUCTURES INCLUDING A VANADIUM OR INDIUM LAYER
Publication number
20210242011
Publication date
Aug 5, 2021
ASM IP HOLDING B.V.
Eric James Shero
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A PHOTORESIST UNDERLAYER AND STRUCTURE INCLUDING...
Publication number
20210111025
Publication date
Apr 15, 2021
ASM IP HOLDING B.V.
Ivan Zyulkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
Publication number
20210033977
Publication date
Feb 4, 2021
ASM IP HOLDING B.V.
Ivo Raaijmakers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...
Publication number
20210005723
Publication date
Jan 7, 2021
ASM IP HOLDING B.V.
Fu Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...
Publication number
20200343358
Publication date
Oct 29, 2020
ASM IP HOLDING B.V.
Chiyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
Publication number
20200328285
Publication date
Oct 15, 2020
ASM IP HOLDING B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SULFUR-CONTAINING THIN FILMS
Publication number
20200266054
Publication date
Aug 20, 2020
ASM IP HOLDING B.V.
Suvi P. Haukka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SEM...
Publication number
20200227325
Publication date
Jul 16, 2020
ASM IP HOLDING B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...
Publication number
20200161438
Publication date
May 21, 2020
ASM IP HOLDING B.V.
Fu Tang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STRUCTURES INCLUDING METAL CARBIDE MATERIAL, DEVICES INCLUDING THE...
Publication number
20190390338
Publication date
Dec 26, 2019
ASM IP HOLDING B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A GERMANIUM OXYNITRIDE FILM
Publication number
20190378916
Publication date
Dec 12, 2019
ASM IP HOLDING B.V.
Fu Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SULFUR-CONTAINING THIN FILMS
Publication number
20190259605
Publication date
Aug 22, 2019
ASM IP HOLDING B.V.
Suvi P. Haukka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A TRANSITION METAL NITRIDE FILM ON A SUBSTRATE...
Publication number
20190164763
Publication date
May 30, 2019
ASM IP HOLDING B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SEM...
Publication number
20190088555
Publication date
Mar 21, 2019
ASM IP HOLDING B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
Publication number
20190043962
Publication date
Feb 7, 2019
ASM IP HOLDING B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...
Publication number
20190027573
Publication date
Jan 24, 2019
ASM IP HOLDING B.V.
Chiyu Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOURCE/DRAIN PERFORMANCE THROUGH CONFORMAL SOLID STATE DOPING
Publication number
20180308686
Publication date
Oct 25, 2018
ASM IP HOLDING B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE AND RELATED SEMICONDUCTO...
Publication number
20180122709
Publication date
May 3, 2018
ASM IP HOLDING B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A TRANSITION METAL NITRIDE FILM ON A SUBSTRATE...
Publication number
20180122642
Publication date
May 3, 2018
ASM IP HOLDING B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SULFUR-CONTAINING THIN FILMS
Publication number
20180068846
Publication date
Mar 8, 2018
ASM IP HOLDING B.V.
Suvi P. Haukka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOURCE/DRAIN PERFORMANCE THROUGH CONFORMAL SOLID STATE DOPING
Publication number
20170316933
Publication date
Nov 2, 2017
ASM IP HOLDING B.V.
Qi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A GERMANIUM OXYNITRIDE FILM
Publication number
20170317194
Publication date
Nov 2, 2017
ASM IP HOLDING B.V.
Fu Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF METAL BORIDES
Publication number
20170306478
Publication date
Oct 26, 2017
ASM IP HOLDING B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...