Michael E. Khau

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for drying a substrate
- Patent number 8,635,784
- Issue date Jan 28, 2014
- Applied Materials, Inc.
- Gary C. Ettinger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR DRYING A SUBSTRATE
- Publication number 20070094886
- Publication date May 3, 2007
- APPLIED MATERIALS, INC.
- Gary C. Ettinger
- H01 - BASIC ELECTRIC ELEMENTS