Michael E. Mack

Person

Manchester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and device for adjusting a beam property in a gas cluster io...
- Patent number 7,696,495
- Issue date Apr 13, 2010
- TEL Epion Inc.
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for and method of gas cluster ion beam processing
- Patent number 7,377,228
- Issue date May 27, 2008
- TEL Epion Inc.
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ionizer and method for gas-cluster ion-beam formation
- Patent number 7,173,252
- Issue date Feb 6, 2007
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved processing with a gas-cluster ion...
- Patent number 7,060,989
- Issue date Jun 13, 2006
- Epion Corporation
- David R. Swenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved beam stability in high current ga...
- Patent number 7,060,988
- Issue date Jun 13, 2006
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam size diagnostics and workpiece processing
- Patent number 6,831,272
- Issue date Dec 14, 2004
- Epion Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charging control and dosimetry system for gas cluster ion beam
- Patent number 6,646,277
- Issue date Nov 11, 2003
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotatable workpiece support including cyclindrical workpiece suppor...
- Patent number 6,222,196
- Issue date Apr 24, 2001
- Axcelis Technologies, Inc.
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for monitoring charge neutralization operation
- Patent number 5,959,305
- Issue date Sep 28, 1999
- Eaton Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zero deflection magnetically-suppressed Faraday for ion implanters
- Patent number 5,757,018
- Issue date May 26, 1998
- Varian Associates, Inc.
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system having beam-defining slit formed by ro...
- Patent number 5,629,528
- Issue date May 13, 1997
- Varian Associates, Inc.
- Jonathan A. Jost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid flow control method and apparatus for minimizing particle con...
- Patent number 5,240,046
- Issue date Aug 31, 1993
- Eaton Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid flow control method and apparatus for minimizing particle con...
- Patent number 5,031,674
- Issue date Jul 16, 1991
- Eaton Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid flow control method and apparatus for minimizing particle con...
- Patent number 4,987,933
- Issue date Jan 29, 1991
- Eaton Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electro-optical modulator for an electro-optically modulated laser
- Patent number 4,669,085
- Issue date May 26, 1987
- The United States of America as represented by the Secretary of the Navy
- Bertrand E. Plourde
- G02 - OPTICS
Information Patent Grant
Laser ceilometer signal processing means
- Patent number 4,289,397
- Issue date Sep 15, 1981
- Avco Everett Research Laboratory, Inc.
- Irving Itzkan
- G01 - MEASURING TESTING
Information Patent Grant
Flow channel for fluid medium laser
- Patent number 4,170,762
- Issue date Oct 9, 1979
- Jersey Nuclear-Avco Isotopes, Inc.
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stabilized repetitively pulsed flashlamps
- Patent number 4,074,208
- Issue date Feb 14, 1978
- Jersey Nuclear-Avco Isotopes, Inc.
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR ADJUSTING A BEAM PROPERTY IN A GAS CLUSTER IO...
- Publication number 20090084977
- Publication date Apr 2, 2009
- TEL Epion Inc.
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ionizer and method for gas-cluster ion-beam formation
- Publication number 20060097185
- Publication date May 11, 2006
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved processing with a gas-cluster ion...
- Publication number 20050205802
- Publication date Sep 22, 2005
- Epion Corporation
- David R. Swenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved beam stability in high current ga...
- Publication number 20050205801
- Publication date Sep 22, 2005
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System for and method of gas cluster ion beam processing
- Publication number 20040113093
- Publication date Jun 17, 2004
- Epion Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Charging control and dosimetry system for gas cluster ion beam
- Publication number 20020130275
- Publication date Sep 19, 2002
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas cluster ion beam size diagnostics and workpiece processing
- Publication number 20020070361
- Publication date Jun 13, 2002
- Epion Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Michael E. Mack

Person

Patents Grantslast 30 patents

Method and device for adjusting a beam property in a gas cluster io...

System for and method of gas cluster ion beam processing

Ionizer and method for gas-cluster ion-beam formation

Method and apparatus for improved processing with a gas-cluster ion...

Method and apparatus for improved beam stability in high current ga...

Gas cluster ion beam size diagnostics and workpiece processing

Charging control and dosimetry system for gas cluster ion beam

Rotatable workpiece support including cyclindrical workpiece suppor...

Method and apparatus for monitoring charge neutralization operation

Zero deflection magnetically-suppressed Faraday for ion implanters

Charged particle beam system having beam-defining slit formed by ro...

Fluid flow control method and apparatus for minimizing particle con...

Fluid flow control method and apparatus for minimizing particle con...

Fluid flow control method and apparatus for minimizing particle con...

Electro-optical modulator for an electro-optically modulated laser

Laser ceilometer signal processing means

Flow channel for fluid medium laser

Stabilized repetitively pulsed flashlamps

Patents Applicationslast 30 patents

METHOD AND DEVICE FOR ADJUSTING A BEAM PROPERTY IN A GAS CLUSTER IO...

Ionizer and method for gas-cluster ion-beam formation

Method and apparatus for improved processing with a gas-cluster ion...

Method and apparatus for improved beam stability in high current ga...

System for and method of gas cluster ion beam processing

Charging control and dosimetry system for gas cluster ion beam

Gas cluster ion beam size diagnostics and workpiece processing