Michael E. Malinowski

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Livermore, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for detecting the presence and thickness of ca...
- Patent number 6,847,463
- Issue date Jan 25, 2005
- EUV, LLC
- Michael E. Malinowski
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for detecting the presence and thickness of ca...
- Publication number 20030227636
- Publication date Dec 11, 2003
- Michael Edward Malinowski
- G01 - MEASURING TESTING
Information Patent Application
Method for reducing carbon contamination of multilayer mirrors
- Publication number 20030064161
- Publication date Apr 3, 2003
- Michael E. Malinowski
- G02 - OPTICS