Michael Erath

Person

Dietenheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Weight-force compensation device
- Patent number 11,537,052
- Issue date Dec 27, 2022
- Carl Zeiss SMT GmbH
- Michael Erath
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical arrangement, in particular lithography system
- Patent number 10,809,636
- Issue date Oct 20, 2020
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement, in particular lithography system, with a trans...
- Patent number 10,761,436
- Issue date Sep 1, 2020
- Carl Zeiss SMT GmbH
- Ralf Zweering
- G02 - OPTICS
Information Patent Grant
Assembly in a microlithographic projection exposure apparatus
- Patent number 10,571,816
- Issue date Feb 25, 2020
- Carl Zeiss SMT GmbH
- Jasper Wesselingh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for aligning a component
- Patent number 10,254,664
- Issue date Apr 9, 2019
- Carl Zeiss SMT GmbH
- Michael Erath
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for mounting an optical element
- Patent number 9,448,384
- Issue date Sep 20, 2016
- Carl Zeiss SMT GmbH
- Michael Erath
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATT...
- Publication number 20240175479
- Publication date May 30, 2024
- ASML NETHERLANDS B.V.
- Maarten Hartger KIMMAN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A...
- Publication number 20230081234
- Publication date Mar 16, 2023
- Carl Zeiss SMT GMBH
- Philipp Gaida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WEIGHT-FORCE COMPENSATION DEVICE
- Publication number 20200159131
- Publication date May 21, 2020
- Carl Zeiss SMT GMBH
- Michael Erath
- G02 - OPTICS
Information Patent Application
ASSEMBLY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20190361362
- Publication date Nov 28, 2019
- Carl Zeiss SMT GMBH
- Jasper Wesselingh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM
- Publication number 20190339626
- Publication date Nov 7, 2019
- Carl Zeiss SMT GMBH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM, WITH A TRANS...
- Publication number 20190339625
- Publication date Nov 7, 2019
- Carl Zeiss SMT GMBH
- Ralf Zweering
- G02 - OPTICS
Information Patent Application
DEVICE FOR ALIGNING A COMPONENT
- Publication number 20180284626
- Publication date Oct 4, 2018
- Carl Zeiss SMT GMBH
- Michael Erath
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT
- Publication number 20130314681
- Publication date Nov 28, 2013
- Michael Erath
- G02 - OPTICS

Michael Erath

Person

Patents Grantslast 30 patents

Weight-force compensation device

Optical arrangement, in particular lithography system

Optical arrangement, in particular lithography system, with a trans...

Assembly in a microlithographic projection exposure apparatus

Device for aligning a component

Arrangement for mounting an optical element

Patents Applicationslast 30 patents

A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATT...

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A...

WEIGHT-FORCE COMPENSATION DEVICE

ASSEMBLY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM

OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM, WITH A TRANS...

DEVICE FOR ALIGNING A COMPONENT

ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT