Michael F. Meehan

Follow

Person

Southbury, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Actuator system using multiple piezoelectric actuators
- Patent number 8,446,562
- Issue date May 21, 2013
- ASML Holding N.V.
- Michael F. Meehan
- G02 - OPTICS
Information Patent Grant
Apparatus for mounting two or more elements and method for processi...
- Patent number 7,800,849
- Issue date Sep 21, 2010
- Carl Zeiss SMT AG
- Hubert Holderer
- G01 - MEASURING TESTING
Information Patent Grant
Device for holding a beam splitter element
- Patent number 7,079,331
- Issue date Jul 18, 2006
- Carl Zeiss SMT AG
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Apparatus, system, and method for precision positioning and alignme...
- Patent number 6,760,167
- Issue date Jul 6, 2004
- ASML Holding N.V.
- Michael F. Meehan
- G02 - OPTICS
Information Patent Grant
Apparatus, system, and method for precision positioning and alignme...
- Patent number 6,556,364
- Issue date Apr 29, 2003
- Michael F. Meehan
- G02 - OPTICS
Information Patent Grant
Apparatus, system, and method for active compensation of aberration...
- Patent number 6,411,426
- Issue date Jun 25, 2002
- ASML, US, Inc.
- Michael F. Meehan
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Actuator System Using Multiple Piezoelectric Actuators
- Publication number 20100026976
- Publication date Feb 4, 2010
- ASML Holding N.V.
- Michael F. Meehan
- G02 - OPTICS
Information Patent Application
APPARATUS FOR MOUNTING TWO OR MORE ELEMENTS AND METHOD FOR PROCESSI...
- Publication number 20090015947
- Publication date Jan 15, 2009
- Hubert Holderer
- G01 - MEASURING TESTING
Information Patent Application
Device for holding a beam splitter element
- Publication number 20050248858
- Publication date Nov 10, 2005
- Carl Zeiss SMT AG
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
Apparatus, system, and method for precision positioning and alignme...
- Publication number 20030202260
- Publication date Oct 30, 2003
- Michael F. Meehan
- G02 - OPTICS
Information Patent Application
Apparatus, system, and method for active compensation of aberration...
- Publication number 20020089734
- Publication date Jul 11, 2002
- Michael F. Meehan
- G02 - OPTICS
Information Patent Application
Apparatus, system, and method for precision positioning and alignme...
- Publication number 20010033437
- Publication date Oct 25, 2001
- Silicon Valley Group, Inc.
- Michael F. Meehan
- G02 - OPTICS