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Michael Francis Houlihan
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Millington, NJ, US
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last 30 patents
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Patent Grant
Photoresist suitable for use in 157 nm photolithography and includi...
Patent number
7,169,531
Issue date
Jan 30, 2007
Infineon Technologies, AG
Christoph Hohle
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
Photoresist suitable for use in 157 nm photolithography and includi...
Publication number
20050170279
Publication date
Aug 4, 2005
Christoph Hohle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY