Michael Fritze

Person

Acton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system of lithography using masks having gray-tone features
- Patent number 7,651,821
- Issue date Jan 26, 2010
- Massachusetts Institute of Technology
- Brian Tyrrell
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for photolithography using multiple illuminations and a sing...
- Patent number 7,583,360
- Issue date Sep 1, 2009
- Massachusetts Institute of Technology
- Michael Fritze
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system of lithography using masks having gray-tone features
- Patent number 7,306,881
- Issue date Dec 11, 2007
- Massachusetts Institute of Technology
- Michael Fritze
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for photolithography using multiple illuminations and a sing...
- Patent number 6,934,007
- Issue date Aug 23, 2005
- Massachusetts Institute of Technology
- Michael Fritze
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system of lithography using masks having gray-tone features
- Patent number 6,884,551
- Issue date Apr 26, 2005
- Massachusetts Institute of Technology
- Michael Fritze
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of design and fabrication of integrated circuits using regul...
- Patent number 6,818,389
- Issue date Nov 16, 2004
- Massachusetts Institute of Technology
- Michael Fritze
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method and system of lithography using masks having gray-tone features
- Publication number 20050238965
- Publication date Oct 27, 2005
- Brian Tyrrell
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for photolithography using multiple illuminations and a sing...
- Publication number 20050221231
- Publication date Oct 6, 2005
- Michael Fritze
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system of lithography using masks having gray-tone features
- Publication number 20040259042
- Publication date Dec 23, 2004
- Michael Fritze
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mode converter including tapered waveguide for optically coupling p...
- Publication number 20040114869
- Publication date Jun 17, 2004
- Eugene E. Fike
- G02 - OPTICS
Information Patent Application
Method for photolithography using multiple illuminations and a sing...
- Publication number 20030223050
- Publication date Dec 4, 2003
- Michael Fritze
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system of lithography using masks having gray-tone features
- Publication number 20030165749
- Publication date Sep 4, 2003
- Michael Fritze
- B82 - NANO-TECHNOLOGY
Information Patent Application
Vertical waveguide tapers for optical coupling between optical fibe...
- Publication number 20020191916
- Publication date Dec 19, 2002
- Confluent Photonics, Corporation
- Michael B. Frish
- G02 - OPTICS
Information Patent Application
Method of design and fabrication of integrated circuits using regul...
- Publication number 20020045136
- Publication date Apr 18, 2002
- Michael Fritze
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michael Fritze

Person

Patents Grantslast 30 patents

Method and system of lithography using masks having gray-tone features

Method for photolithography using multiple illuminations and a sing...

Method and system of lithography using masks having gray-tone features

Method for photolithography using multiple illuminations and a sing...

Method and system of lithography using masks having gray-tone features

Method of design and fabrication of integrated circuits using regul...

Patents Applicationslast 30 patents

Method and system of lithography using masks having gray-tone features

Method for photolithography using multiple illuminations and a sing...

Method and system of lithography using masks having gray-tone features

Mode converter including tapered waveguide for optically coupling p...

Method for photolithography using multiple illuminations and a sing...

Method and system of lithography using masks having gray-tone features

Vertical waveguide tapers for optical coupling between optical fibe...

Method of design and fabrication of integrated circuits using regul...