Michael GANSTER

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Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
- Publication number 20130284208
- Publication date Oct 31, 2013
- LAM RESEARCH AG
- Philipp ZAGORZ
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS AND METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
- Publication number 20130260569
- Publication date Oct 3, 2013
- LAM RESEARCH AG
- Michael GANSTER
- H01 - BASIC ELECTRIC ELEMENTS