Michael Gasvoda

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Los Gatos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
- Patent number 9,645,097
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING
- Publication number 20150370175
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING