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Michael GLEESON
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Leiderdorp, NL
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last 30 patents
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Patent Grant
Method for producing a reflective optical element for EUV-lithography
Patent number
9,733,580
Issue date
Aug 15, 2017
Carl Zeiss SMT GmbH
Alexey Kuznetzov
B82 - NANO-TECHNOLOGY
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last 30 patents
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METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR EUV-LITHOGRAPHY
Publication number
20140193591
Publication date
Jul 10, 2014
Carl Zeiss SMT GMBH
Alexey KUZNETZOV
B82 - NANO-TECHNOLOGY