Michael G.R. Smith

Person

Dublin, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Proximity substrate preparation sequence, and method, apparatus, an...
- Patent number 8,236,382
- Issue date Aug 7, 2012
- Lam Research Corporation
- Michael Ravkin
- B08 - CLEANING
Information Patent Grant
Methods for processing wafer surfaces using thin, high velocity flu...
- Patent number 7,534,307
- Issue date May 19, 2009
- Lam Research Corporation
- Michael Ravkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate proximity processing structures
- Patent number 7,406,972
- Issue date Aug 5, 2008
- Lam Research Corporation
- Carl Woods
- B08 - CLEANING
Information Patent Grant
Proximity meniscus manifold
- Patent number 7,389,783
- Issue date Jun 24, 2008
- Lam Research Corporation
- Carl Woods
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for processing wafer surfaces using thin, high...
- Patent number 7,383,843
- Issue date Jun 10, 2008
- Lam Research Corporation
- Michael Ravkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate proximity processing housing and insert for generating a...
- Patent number 7,293,571
- Issue date Nov 13, 2007
- Lam Research Corporation
- Carl Woods
- B08 - CLEANING
Information Patent Grant
Megasonic cleaning efficiency using auto-tuning of an RF generator...
- Patent number 6,995,067
- Issue date Feb 7, 2006
- Lam Research Corporation
- John Boyd
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Concentric proximity processing head
- Patent number 6,954,993
- Issue date Oct 18, 2005
- Lam Research Corporation
- Michael G. R. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for producing uniform process rates
- Patent number 6,518,705
- Issue date Feb 11, 2003
- Lam Research Corporation
- Mark H. Wilcoxson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control system for plasma processing apparatus
- Patent number 6,302,966
- Issue date Oct 16, 2001
- Lam Research Corporation
- Andrew D. Bailey
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
USE OF VACUUM DURING TRANSFER OF SUBSTRATES
- Publication number 20220305601
- Publication date Sep 29, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods for Processing Wafer Surfaces Using Thin, High Velocity Flu...
- Publication number 20080230097
- Publication date Sep 25, 2008
- Lam Research Corp.
- Michael Ravkin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate proximity processing structures
- Publication number 20080006307
- Publication date Jan 10, 2008
- Lam Research Corp.
- Carl Woods
- B08 - CLEANING
Information Patent Application
Megasonic cleaning efficiency using auto-tuning of a RF generator a...
- Publication number 20060000487
- Publication date Jan 5, 2006
- LAM RESEARCH CORPORATION
- John Boyd
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
CONCENTRIC PROXIMITY PROCESSING HEAD
- Publication number 20050217137
- Publication date Oct 6, 2005
- Lam Research Corp.
- Michael G.R. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Proximity substrate preparation sequence, and method, apparatus, an...
- Publication number 20050158473
- Publication date Jul 21, 2005
- Lam Research Corp.
- Michael Raykin
- B08 - CLEANING
Information Patent Application
Method and apparatus for processing wafer surfaces using thin, high...
- Publication number 20050145265
- Publication date Jul 7, 2005
- Lam Research Corp.
- Michael Ravkin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate proximity processing structures and methods for using and...
- Publication number 20050148197
- Publication date Jul 7, 2005
- Lam Research Corp.
- Carl Woods
- B08 - CLEANING
Information Patent Application
Proximity meniscus manifold
- Publication number 20050139318
- Publication date Jun 30, 2005
- Lam Research Corp.
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for producing uniform process rates
- Publication number 20030145952
- Publication date Aug 7, 2003
- Lam Research Corporation
- Mark H. Wilcoxson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING UNIFORM PROCESS RATES
- Publication number 20020175869
- Publication date Nov 28, 2002
- Lam Research Corporation
- Mark H. Wilcoxson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature control system for plasma processing apparatus
- Publication number 20020007795
- Publication date Jan 24, 2002
- Andrew D. Bailey
- H01 - BASIC ELECTRIC ELEMENTS

Michael G.R. Smith

Person

Patents Grantslast 30 patents

Proximity substrate preparation sequence, and method, apparatus, an...

Methods for processing wafer surfaces using thin, high velocity flu...

Substrate proximity processing structures

Proximity meniscus manifold

Method and apparatus for processing wafer surfaces using thin, high...

Substrate proximity processing housing and insert for generating a...

Megasonic cleaning efficiency using auto-tuning of an RF generator...

Concentric proximity processing head

Method and apparatus for producing uniform process rates

Temperature control system for plasma processing apparatus

Patents Applicationslast 30 patents

USE OF VACUUM DURING TRANSFER OF SUBSTRATES

Methods for Processing Wafer Surfaces Using Thin, High Velocity Flu...

Substrate proximity processing structures

Megasonic cleaning efficiency using auto-tuning of a RF generator a...

CONCENTRIC PROXIMITY PROCESSING HEAD

Proximity substrate preparation sequence, and method, apparatus, an...

Method and apparatus for processing wafer surfaces using thin, high...

Substrate proximity processing structures and methods for using and...

Proximity meniscus manifold

Method and apparatus for producing uniform process rates

METHOD AND APPARATUS FOR PRODUCING UNIFORM PROCESS RATES

Temperature control system for plasma processing apparatus