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Michael Grandy
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Patents Grants
last 30 patents
Information
Patent Grant
Determining the position of a semiconductor substrate on a rotation...
Patent number
7,746,482
Issue date
Jun 29, 2010
Ottmar Graf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for thermal treatment of substrates
Patent number
6,953,338
Issue date
Oct 11, 2005
Steag RTP Systems GmbH
Uwe Kreiser
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Determining the Position of a Semiconductor Substrate on a Rotation...
Publication number
20080316505
Publication date
Dec 25, 2008
Ottmar Graf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device for accommodating disk-shaped objects and apparatus for hand...
Publication number
20060245906
Publication date
Nov 2, 2006
Arthur Pelzmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device for accommodating disk-shaped objects and apparatus for hand...
Publication number
20040126213
Publication date
Jul 1, 2004
Arthur Pelzmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device for thermal treatment of substrates
Publication number
20040029065
Publication date
Feb 12, 2004
Uwe Kreiser
H01 - BASIC ELECTRIC ELEMENTS