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Michael H. Peine
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Maple Grove, MN, US
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last 30 patents
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Patent Grant
End effector alignment tool for substrate handling system
Patent number
6,820,349
Issue date
Nov 23, 2004
August Technology Corp.
Michael H. Peine
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
End effector alignment tool for substrate handling system
Publication number
20040060187
Publication date
Apr 1, 2004
August Technology, Corp.
Michael H. Peine
H01 - BASIC ELECTRIC ELEMENTS