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Michael Haberler
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Wien, AT
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last 30 patents
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Patent Grant
Pattern data processing for programmable direct-write apparatus
Patent number
12,040,157
Issue date
Jul 16, 2024
IMS Nanofabrication GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Optimizing Image Distortion in a Multi Beam Charged Particle Proces...
Publication number
20240304413
Publication date
Sep 12, 2024
IMS Nanofabrication GmbH
Christoph Spengler
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Pattern Data Processing For Programmable Direct-Write Apparatus
Publication number
20220384143
Publication date
Dec 1, 2022
IMS Nanofabrication GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS