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Michael Halama

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  • Wetzlar, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer inspection device
    • Patent number 7,424,393
    • Issue date Sep 9, 2008
    • Vistec Semiconductor Systems GmbH
    • Michael Halama
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    Wafer inspection device
    • Publication number 20070040241
    • Publication date Feb 22, 2007
    • Michael Halama
    • G01 - MEASURING TESTING