Michael Hanagan

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Grafton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and method of making same
- Patent number 10,497,598
- Issue date Dec 3, 2019
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic Chuck and Method of Making Same
- Publication number 20160336210
- Publication date Nov 17, 2016
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS