Michael Harris

Person

Hudson, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
- Patent number 11,733,224
- Issue date Aug 22, 2023
- MKS Instruments, Inc.
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
- Patent number 11,262,340
- Issue date Mar 1, 2022
- MKS Instruments, Inc.
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Grant
Radical output monitor for a remote plasma source and method of use
- Patent number 11,114,287
- Issue date Sep 7, 2021
- MKS Instruments, Inc.
- Michael Harris
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CURRENT SENSING USING EMBEDDED ELECTRODES
- Publication number 20240312772
- Publication date Sep 19, 2024
- MKS Instruments, Inc.
- Chiu-Ying Tai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PLASMA IGNITION IN TOROIDAL PLASMA SOURCES
- Publication number 20240284584
- Publication date Aug 22, 2024
- MKS Instruments, Inc.
- Ilya Pokidov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods and Systems for Feedback Control in Plasma Processing Using...
- Publication number 20230369033
- Publication date Nov 16, 2023
- MKS Instruments, Inc.
- Keith K. Koai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATINGS FOR USE IN REMOTE PLASMA SOURCE APPLICATIONS AND METHOD OF...
- Publication number 20230332320
- Publication date Oct 19, 2023
- MKS Instruments, Inc.
- Chiu-Ying TAI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
- Publication number 20220214321
- Publication date Jul 7, 2022
- MKS Instruments, Inc.
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Application
Radical Output Monitor for a Remote Plasma Source and Method of Use
- Publication number 20190385829
- Publication date Dec 19, 2019
- MKS Instruments, Inc.
- Michael Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
- Publication number 20190170715
- Publication date Jun 6, 2019
- MKS Instruments
- Johannes Chiu
- G01 - MEASURING TESTING

Michael Harris

Person

Patents Grantslast 30 patents

Multi-sensor gas sampling detection system for radical gases and sh...

Multi-sensor gas sampling detection system for radical gases and sh...

Radical output monitor for a remote plasma source and method of use

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR CURRENT SENSING USING EMBEDDED ELECTRODES

METHOD AND APPARATUS FOR PLASMA IGNITION IN TOROIDAL PLASMA SOURCES

Methods and Systems for Feedback Control in Plasma Processing Using...

COATINGS FOR USE IN REMOTE PLASMA SOURCE APPLICATIONS AND METHOD OF...

Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...

Radical Output Monitor for a Remote Plasma Source and Method of Use

Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...