Michael Hartl

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Munich, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for determining the influencing of the state o...
- Patent number 7,286,245
- Issue date Oct 23, 2007
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR DETERMINING THE INFLUENCING OF THE STATE O...
- Publication number 20080037905
- Publication date Feb 14, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS
Information Patent Application
Method and apparatus for determining the influencing of the state o...
- Publication number 20040114150
- Publication date Jun 17, 2004
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G02 - OPTICS