Michael Heumüller

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Neuhof, DE

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Patents Grantslast 30 patents

Information Patent Grant
Mask carrier, mask handling module and method for adjusting a mask
- Patent number 9,348,237
- Issue date May 24, 2016
- Applied Materials, Inc.
- Michael Heumüller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MASK CARRIER, MASK HANDLING MODULE AND METHOD FOR ADJUSTING A MASK
- Publication number 20120037819
- Publication date Feb 16, 2012
- Michael Heumüller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...