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Michael Hofmann
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Heuchelheim, DE
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last 30 patents
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Patent Grant
Device and method for evaluating defects in the edge area of a wafe...
Patent number
8,089,622
Issue date
Jan 3, 2012
Vistec Semiconductor Systems GmbH
Andreas Birkner
G01 - MEASURING TESTING
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Patent Grant
Illumination means and inspection means having an illumination means
Patent number
8,087,799
Issue date
Jan 3, 2012
Vistec Semiconductor Systems GmbH
Kurt Hahn
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Illumination means and inspection means having an illumination means
Publication number
20090086483
Publication date
Apr 2, 2009
Vistec Semiconductor System GmbH
Kurt Hahn
G01 - MEASURING TESTING
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Patent Application
DEVICE AND METHOD FOR EVALUATING DEFECTS IN THE EDGE AREA OF A WAFE...
Publication number
20080232672
Publication date
Sep 25, 2008
Vistec Semiconductor Systems GmbH
Andreas Birkner
G01 - MEASURING TESTING