Michael Hopkins

Person

Raheny, IE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for process control of semiconductor manufacturing equipment
- Patent number 7,062,411
- Issue date Jun 13, 2006
- Scientific Systems Research Limited
- Michael Hopkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency Langmuir probe
- Patent number 7,015,703
- Issue date Mar 21, 2006
- Scientific Systems Research Limited
- Michael Hopkins
- G01 - MEASURING TESTING
Information Patent Grant
Fault classification in a plasma process chamber
- Patent number 6,826,489
- Issue date Nov 30, 2004
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Endpoint detection in the etching of dielectric layers
- Patent number 6,677,246
- Issue date Jan 13, 2004
- Scientific Systems Research Ltd.
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF current sensor
- Patent number 6,501,285
- Issue date Dec 31, 2002
- Scientific Systems Research Limited
- Michael B. Hopkins
- G01 - MEASURING TESTING
Information Patent Grant
Method of processing a high frequency signal containing multiple fu...
- Patent number 6,469,488
- Issue date Oct 22, 2002
- Scientific Systems Research Limited
- Michael B. Hopkins
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for sensing RF current delivered to a plasma with two ind...
- Patent number 6,061,006
- Issue date May 9, 2000
- Scientific Systems Research Limited
- Michael Hopkins
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for sensing RF current delivered to a plasma with two ind...
- Patent number 5,808,415
- Issue date Sep 15, 1998
- Scientific Systems Research Limited
- Michael Hopkins
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR SENSING RF SIGNALS FROM RF PLASMA PROCESSI...
- Publication number 20220196558
- Publication date Jun 23, 2022
- Impedans Ltd
- Michael HOPKINS
- G01 - MEASURING TESTING
Information Patent Application
ANALYSING RF SIGNALS FROM A PLASMA SYSTEM
- Publication number 20150276833
- Publication date Oct 1, 2015
- Impedans Ltd
- Paul Scullin
- G01 - MEASURING TESTING
Information Patent Application
Radio frequency langmuir probe
- Publication number 20050035770
- Publication date Feb 17, 2005
- Michael Hopkins
- G01 - MEASURING TESTING
Information Patent Application
Method for process control of semiconductor manufactiring equipment
- Publication number 20040254762
- Publication date Dec 16, 2004
- Michael Hopkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fault classification in a plasma process chamber
- Publication number 20030153989
- Publication date Aug 14, 2003
- John Scanlan
- G05 - CONTROLLING REGULATING
Information Patent Application
Endpoint detection in the etching of dielectric layers
- Publication number 20020048960
- Publication date Apr 25, 2002
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS

Michael Hopkins

Person

Patents Grantslast 30 patents

Method for process control of semiconductor manufacturing equipment

Radio frequency Langmuir probe

Fault classification in a plasma process chamber

Endpoint detection in the etching of dielectric layers

RF current sensor

Method of processing a high frequency signal containing multiple fu...

Apparatus for sensing RF current delivered to a plasma with two ind...

Apparatus for sensing RF current delivered to a plasma with two ind...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR SENSING RF SIGNALS FROM RF PLASMA PROCESSI...

ANALYSING RF SIGNALS FROM A PLASMA SYSTEM

Radio frequency langmuir probe

Method for process control of semiconductor manufactiring equipment

Fault classification in a plasma process chamber

Endpoint detection in the etching of dielectric layers