TREA

Michael Ioannou

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  • Acton, MA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer 2D scan mechanism
    • Patent number 7,112,808
    • Issue date Sep 26, 2006
    • Axcelis Technologies, Inc.
    • Michael Ioannou
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Wafer 2D scan mechanism
    • Publication number 20050184253
    • Publication date Aug 25, 2005
    • Michael Ioannou
    • H01 - BASIC ELECTRIC ELEMENTS