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Michael J. Darwin
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Beaverton, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Interferometer and method for measuring characteristics of opticall...
Patent number
7,948,636
Issue date
May 24, 2011
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer and method for measuring characteristics of opticall...
Patent number
7,684,049
Issue date
Mar 23, 2010
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for defect detection
Patent number
7,539,583
Issue date
May 26, 2009
Rudolph Technologies, Inc.
Yonghang Fu
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer and method for measuring characteristics of opticall...
Patent number
7,324,214
Issue date
Jan 29, 2008
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALL...
Publication number
20100265516
Publication date
Oct 21, 2010
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALL...
Publication number
20080266574
Publication date
Oct 30, 2008
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Application
Interferometer and method for measuring characteristics of opticall...
Publication number
20070046953
Publication date
Mar 1, 2007
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Application
Method and system for defect detection
Publication number
20060199287
Publication date
Sep 7, 2006
Yonghang Fu
G01 - MEASURING TESTING