Michael J. Foline

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Carver, MN, US

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Patents Grantslast 30 patents

Information Patent Grant
Combined process chamber with multi-positionable pedestal
- Patent number 6,221,781
- Issue date Apr 24, 2001
- FSI International, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum compatible water vapor and rinse process module
- Patent number 5,820,692
- Issue date Oct 13, 1998
- FSI Interntional
- James J. Baecker
- H01 - BASIC ELECTRIC ELEMENTS