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Michael J. Hammond
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Norton, GB
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last 30 patents
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Patent Grant
Optical metrology device using numerical aperture reduction
Patent number
11,162,897
Issue date
Nov 2, 2021
Onto Innovation Inc.
George Andrew Antonelli
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
OPTICAL METROLOGY DEVICE USING NUMERICAL APERTURE REDUCTION
Publication number
20200363332
Publication date
Nov 19, 2020
ONTO INNOVATION INC.
George Andrew Antonelli
G01 - MEASURING TESTING
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Patent Application
Parallel Acquisition Of Spectra For Diffraction Based Overlay
Publication number
20120224176
Publication date
Sep 6, 2012
Nanometrics Incorporated
Michael J. Hammond
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY